Yttrium Cyclopentadienyl Precursors

The broadest yttrium Cp precursor portfolio in the industry — with HVM scale-up already underway.

The story

Yttrium oxide thin films are a workhorse material in advanced coatings – valued for their high refractive index, chemical stability, wide bandgap, and compatibility with ALD and CVD processes. As coating applications scale from research to high-volume manufacturing, the demand for reliable, high-purity yttrium precursors at production quantities has grown accordingly.

Ereztech has been building toward this moment for 15 years. We offer the broadest portfolio of yttrium cyclopentadienyl precursors available from a single supplier – seven compounds spanning the full range of Cp ligand substitutions – giving process engineers the flexibility to select the right precursor for their specific deposition conditions, substrate chemistry, and film requirements.

And we are not just a catalog supplier. Y(MeCp)₃ – Tris(methylcyclopentadienyl)yttrium(III) – is already in production and actively scaling to high-volume manufacturing, backed by the same US-based manufacturing infrastructure and 15+ years of metalorganic R&D that underpin our cobalt and magnesium precursor programs.

The Yttrium Precursor Portfolio

Y(Cp)₃

Y(MeCp)₃

Y(EtCp)₃

Y(iPrCp)₃

Y(nBuCp)₃

(EtCp)2YCl

The breadth of this portfolio matters. Different Cp ligand substitutions – methyl, ethyl, isopropyl, n-butyl – deliver meaningfully different volatility profiles, decomposition temperatures, and film growth rates. Having access to the full family from a single qualified supplier simplifies precursor screening and accelerates process development.

Applications

Yttrium cyclopentadienyl precursors are used for ALD and CVD deposition of yttrium-containing thin films across a wide range of coating applications:

Optical coatings – Y₂O₃ films for high-refractive-index and protective optical coatings in laser optics, mirrors, and UV applications

Dielectric layers – high-k yttrium oxide films for advanced gate dielectrics and capacitor layers

Protective and barrier coatings – chemically stable Y₂O₃ coatings for corrosion resistance and thermal barrier applications in harsh environments

Superconductor systems – yttrium precursors as a key component in REBCO HTS tape deposition

Phosphor and luminescent materials – yttrium-based thin films for display and lighting applications

EREZTECH Applications image

Why Ereztech

The broadest Cp ligand portfolio

seven yttrium precursors from a single qualified supplier, covering the full range of substitution patterns for process flexibility

HVM scale-up in progress

Y(MeCp)₃ is in production today and scaling to high-volume manufacturing

15+ years of metalorganic R&D and HVM

proven synthesis expertise across the cyclopentadienyl ligand family

Expanding US manufacturing

domestic supply aligned with onshoring priorities across the semiconductor, defense, and energy coating industries

Any packaging format

configured to your deposition system specifications, with vessel cleaning and reconditioning support