Tris(diethylamido)(tert-butylimido)tantalum(V)

Synonym: Tris(acetylacetonato)aluminium, Tris(2,4-pentanedionato)aluminium, Aluminium 2,4-pentanedionate, Al(acac)₃

CAS Number 13963-57-0 | MDL Number MFCD00000013 | EC Number 237-741-6

Product code	AL3570
CAS number	13963-57-0
Assay (purity)	99.9%+
Metal purity	99.99%-Al
Purity method	by EDTA: %Al=8.1-8.5
Molecular weight	324.31 g/mol
Melting point	190-193 °C (374-379.4 °F)
Boiling point	315 °C(599 °F)
Form	solid
Appearance	white to yellow powder
Molecular formula	C15H21AlO6
Linear formula	Al(CH3COCHCOCH3)3
Packaging	glassware/metal containers/bubblers

Aluminium acetylacetonate and synthetic air were applied for the atmospheric pressure hot-wall MOCVD-growth of Al₂O₃ thin films on stainless steel substrates. This product was used as a precursor for the deposition of carbonaceous crystalline Al₂O₃ films on Si(100) by LP MOCVD, as well as on stainless steel, and TiN-coated cemented carbide substrates by LP MOCVD in the absence of oxidant gas. Al(acac)₃ was applied for the growth of Al₂O₃ films on Si(111) substrates at varying temperatures by MOCVD. One more application is as a nontoxic and easy-to-handle precursor for the deposition of amorphous Al₂O₃ thin films on glass and Si(100) substrates by a low-temperature atmospheric-pressure CVD. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing AL3570 contact us at sales@ereztech.com

Safety information

UN	3467
Hazardous class	6.1
Packing group	II
Pictograms
Signal word	DANGER
Hazard statements	H300-H315-H319-H335
Precautionary statements	P261-P264-P270-P271-P280-P301 + P310-P302 + P352-P304 + P340-P305 + P351 + P338-P312-P321-P330-P332 + P313-P337 + P313-P362-P403 + P233
Transport description	ORGANOMETALLIC COMPOUND, SOLID, TOXIC, N.O.S. ( ALUMINIUMACETYLACETONATE)
In TSCA registry	Yes

Certificates of Analysis (CoA)

If you don’t see the needed lot of Aluminium acetylacetonate below please contact customer support at sales@ereztech.com

 

External identifiers for Al(acac)₃

Pubchem CID	16683006
IUPAC Name	(Z)-4-bis[[(Z)-4-oxopent-2-en-2-yl]oxy]alumanyloxypent-3-en-2-one
SMILES	[Al+3].O=C(C)\C=C(/[O-])C.[O-]\C(C)=C/C(C)=O.[O-]\C(C)=C/C(C)=O
InchI Identifier	InChI=1S/3C5H8O2.Al/c3*1-4(6)3-5(2)7;/h3*3,6H,1-2H3;/q;;;+3/p-3/b3*4-3-;
InchI Key	KILURZWTCGSYRE-LNTINUHCSA-K

Known applications and external links

• M.P. Singh, G. Raghavan, A.K. Tyagi, S.A. Shivashankar, Bull. Mater. Sci., 2002, Vol.25, Iss.2, pp 163–168. Carbonaceous alumina films deposited by MOCVD from aluminium acetylacetonate: a spectroscopic ellipsometry study
• M.P Singh, S.A Shivashankar, Surf. Coat. Technology, 2002, vol. 161, Iss. 2–3, p. 135-143. Low-pressure MOCVD of Al2O3 films using aluminium acetylacetonate as precursor: nucleation and growth
• S.K. Pradhan, Ph.J. Reucroft, Y. Ko, Surf. Coat. Techn., 2004, vol. 176, Iss.3, p.382-384. Crystallinity of Al2O3 films deposited by metalorganic chemical vapor deposition
• T. Maruyama, S. Arai, Appl. Phys. Lett. 60, 322 (1992). Aluminum oxide thin films prepared by chemical vapor deposition from aluminum acetylacetonate
• Ch. Pflitsch, A. Muhsin, U. Bergmann, B. Atakan, Surf. Coat. Technology, 2006, Vol.201, Iss. 1–2, p.73-81. Growth of thin aluminium oxide films on stainless steel by MOCVD at ambient pressure and by using a hot-wall CVD-setup

With Aluminium acetylacetonate other customers often ask:

• Tris(diethylamino)aluminum(III)
• Aluminum chloride, anhydrous
• Tris(dimethylamino)aluminum
• Aluminum ethoxide

Ereztech synthesizes and sells additional AL-compounds.

To purchase AL3570 contact us at sales@ereztech.com