Bis(ethylcyclopentadienyl)titanium(IV) dichloride
Synonym: Ti(EtCp)2Cl2, Dichlorobis(ethylcyclopentadienyl)titanium
CAS Number 35625-75-3 | MDL Number MFCD1862447 | EC Number 636-854-1
Bis(ethylcyclopentadienyl)titanium(IV) dichloride is a novel titanium precursor for forming of the high-k dielectric films, used in semiconductor manufacturing. See link below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI5753 contact us at sales@ereztech.com
Safety information
UN | 3261 |
Hazardous class | 8 |
Packing group | II |
Pictograms | |
Signal word | DANGER |
Hazard statements | H315-H319-H335 |
Precautionary statements | P222-P231-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378 |
Transport description | Corrosive solid, acidic, organic, n.o.s. (bis(ethylcyclopentadienyl)titanium(IV) dichloride |
In TSCA registry | No (research and development usage only) |
First Aid Measures
General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
Skin contact | Wash off with soap and plenty of water. Consult a physician. |
Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
If you don’t see the needed lot of Bis(ethylcyclopentadienyl)titanium(IV) dichloride below please contact customer support at sales@ereztech.com
External identifiers for Ti(EtCp)2Cl2
Pubchem CID | 56846575 |
IUPAC Name | 2-ethylcyclopenta-1,3-diene;titanium(4+);dichloride |
SMILES | CCC1=[C-]CC=C1.CCC1=[C-]CC=C1.[Cl-].[Cl-].[Ti+4] |
InchI Identifier | InChI=1S/2C7H9.2ClH.Ti/c2*1-2-7-5-3-4-6-7;;;/h2*3,5H,2,4H2,1H3;2*1H;/q2*-1;;;+4/p-2 |
InchI Key | NDYCJOIYEZKDPF-UHFFFAOYSA-L |
Known applications and external links
With Bis(ethylcyclopentadienyl)titanium(IV) dichloride other customers often ask:
- Titanium(IV) methoxide
- Tetrakis(dimethylamino)titanium(IV)
- Diethylaminotitanium trichloride
- Tetrakis(diethylamino)titanium
Ereztech synthesizes and sells additional TI-compounds.
To purchase TI5753 contact us at sales@ereztech.com