Synonym: BTBAS, Bis(tert-butylamino)silane, Bis(tert-butylamido) silane
CAS Number 186598-40-3 | MDL Number MFCD03411245 | EC Number 631-589-8
Product code | SI8403 |
CAS number | 186598-40-3 |
Assay (purity) | 99.8%+ |
Metal purity | 99.999%-SI |
Molecular weight | 174.36 |
Form | liquid |
Appearance | colorless liquid |
Melting point | <-40 °C (-40 °F) |
Boiling point | 167 °C (332.6 °F) |
Flash point | 30 °C (86 °F) |
Sensitivity | moisture |
Molecular formula | C8H22N2Si |
Linear formula | [NH(C4H9)]2SiH2 |
Packaging | glassware/metal containers/bubblers |
Bis(t-butylamino)silane is a useful reagent, catalyst, and precursor. It is applicated in thin film deposition. Aminosilanes are the best choice as Si source for the deposition of hafnium silicates (HfSiO) and hafnium silicon oxynitrides (HfSiON).
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Bis(t-butylamino)silane contact us at sales@ereztech.com
UN | 2924 |
Hazardous class | 3(8) |
Packing group | II |
Pictograms | |
Signal word | DANGER |
Hazard statements | H226-H260-H301-H314-H318-H332-H402-H412 |
Precautionary statements | P210-P223-P231 + P232-P233-P240-P241-P242-P243-P261-P264-P270-P271-P273-P280-P301 + P310-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P330-P334 + P335-P363-P370 + P378-P391 |
Transport description | Flammable liquid,corrosive n.o.s.(Bis(tert-butylamino) silane) |
In TSCA registry | No (for research and development only) |
General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
Skin contact | Wash off with soap and plenty of water. Consult a physician. |
Inhalation | If breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician. |
If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
If you don’t see the needed lot of Bis(t-butylamino)silane below please contact customer support at sales@ereztech.com
Pubchem CID | 21904012 |
SMILES | CC(C)(C)N[SiH2]NC(C)(C)C |
IUPAC Name | N-(tert-butylamino)silyl-2-methylpropan-2-amine |
InchI Identifier | InChI=1S/C8H22N2Si/c1-7(2,3)9-11-10-8(4,5)6/h9-10H,11H2,1-6H3 |
InchI Key | VYIRVGYSUZPNLF-UHFFFAOYSA-N |
Ereztech synthesizes and sells additional SI-compounds.
To purchase Bis(t-butylamino)silane contact us at sales@ereztech.com