Bis(t-butylamino)silane CAS 186598-40-3

Bis(t-butylamino)silane

Synonym:  BTBAS, Bis(tert-butylamino)silane, Bis(tert-butylamido) silane

CAS Number 186598-40-3 | MDL Number MFCD03411245 | EC Number 631-589-8  

Product code SI8403
CAS number 186598-40-3
Assay (purity) 99.8%+
Metal purity 99.999%-SI
Molecular weight 174.36
Form liquid
Appearance colorless liquid
Melting point <-40 °C (-40 °F)
Boiling point 167 °C (332.6 °F)
Flash point 30 °C (86 °F)
Sensitivity moisture
Molecular formula C8H22N2Si
Linear formula [NH(C4H9)]2SiH2
Packaging glassware/metal containers/bubblers


Bis(t-butylamino)silane is a useful reagent, catalyst, and precursor. It is applicated in thin film deposition. Aminosilanes are the best choice as Si source for the deposition of hafnium silicates (HfSiO) and hafnium silicon oxynitrides (HfSiON).

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Bis(t-butylamino)silane contact us at sales@ereztech.com

Safety information

UN 2924
Hazardous class 3(8)
Packing group II
Pictograms
Signal word DANGER
Hazard statements H226-H260-H301-H314-H318-H332-H402-H412
Precautionary statements P210-P223-P231 + P232-P233-P240-P241-P242-P243-P261-P264-P270-P271-P273-P280-P301 + P310-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P330-P334 + P335-P363-P370 + P378-P391
Transport description Flammable liquid,corrosive n.o.s.(Bis(tert-butylamino) silane)
In TSCA registry No (for research and development only)

First Aid Measures

General advice Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contact Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact Wash off with soap and plenty of water. Consult a physician.
Inhalation If breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

Certificates of analysis (CoA)

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External identifiers for BTBAS

Pubchem CID 21904012
SMILES CC(C)(C)N[SiH2]NC(C)(C)C
IUPAC Name N-(tert-butylamino)silyl-2-methylpropan-2-amine
InchI Identifier InChI=1S/C8H22N2Si/c1-7(2,3)9-11-10-8(4,5)6/h9-10H,11H2,1-6H3
InchI Key VYIRVGYSUZPNLF-UHFFFAOYSA-N

Known applications and external links

With Bis(t-butylamino)silane other customers often ask:

Ereztech synthesizes and sells additional SI-compounds.

To purchase Bis(t-butylamino)silane contact us at sales@ereztech.com