Diethylaminotitanium trichloride

Synonym: Titanium trichloride diethylamide, Trichloro(diethylamino)titanium (IV), TiCl3(NEt2)

CAS Number 684-55-9 | EC Number 810-139-6

CAS 684-55-9

Product codeTI4559
CAS number684-55-9
Assay (purity)99%
Purity methodby titration: %Cl=46.6% (argentometric)
Molecular weight226.35 g/mol
Appearancegreen crystals
Sensitivityair, moisture
Molecular formulaC4H10NTiCl3
Packagingglassware/metal containers/bubblers

Diethylaminotitanium trichloride was applied for the ALD growth of TiN thin films. The films grown using halide amino metal precursors contained lower concentrations of Cl in the film compared to TiN layers deposited with TiCl4. Additional testing revealed a potential preference for TiCl3(NEt2), which is more thermally stable and has reasonable vapor pressure ~0.28 Torr/ 75° C, with TiCl3(NMe2). See link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI4559 contact us at

Safety information

Hazardous class4.3
Packing groupII
Signal wordDANGER
Hazard statementsH261-H314-H318-H335
Precautionary statementsP223-P231 + P232-P260-P264-P271-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport descriptionOrganometallic substance, solid, water-reactive, flammable Diethylaminotitanium trichloride
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Diethylaminotitanium trichloride below please contact customer support at

Lot# 029/166

Known applications and external links

With Diethylaminotitanium trichloride other customers often ask:

Ereztech synthesizes and sells additional TI-compounds.

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