Synonym: 1,1,1,2,2,2-
CAS Number 13465-77-5 | MDL Number MFCD00011599 | EC Number 236-704-1
| Product code | SI5775 |
| CAS number | 13465-77-5 |
| Assay (purity) | 99.9%+ |
| Metal purity | 99.99% – Si |
| Purity method | by GC |
| Molecular weight | 268.88 g/mol |
| Form | liquid |
| Appearance | colorless liquid |
| Melting point | -1°C (30.2°F) |
| Boiling point | 144 to 145.5°C (291.2 to 293.9°F) |
| Sensitivity | moisture |
| Molecular formula | Si2Cl6 |
| Linear formula | (SiCl3)2 |
| Packaging | glassware/metal containers/bubblers |
Hexachlorodisilane and atomic hydrogen have been used for Atomic layer epitaxy of Si on Ge(100). Hexachlorodisilane may be used as a reducing agent. Hexachlorodisilane may be combined with ammonia to form silicon nitride by chemical vapor deposition. A plasma-enhanced atomic layer deposition (ALD) process was developed for the growth of SiNx thin films using Si2Cl6 and NH3 plasma. See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing SI5775 contact us at sales@ereztech.com
| UN | 2987 |
| Hazardous class | 8 |
| Packing group | II |
| Pictograms | |
| Signal word | DANGER |
| Hazard statements | H314-H318 |
| Precautionary statements | P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340 + P310-P305 + P351 + P338 + P310-P363 |
| Transport description | Chlorosilanes, corrosive, n.o.s. |
| In TSCA registry | Yes |
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
If you don’t see the needed lot of Hexachlorodisilane below please contact customer support at sales@ereztech.com
| Pubchem CID | 83497 |
| IUPAC Name | trichloro(trichlorosilyl)silane |
| SMILES | [Si]([Si](Cl)(Cl)Cl)(Cl)(Cl)Cl |
| InchI Identifier | InChI=1S/Cl6Si2/c1-7(2,3)8(4,5)6 |
| InchI Key | LXEXBJXDGVGRAR-UHFFFAOYSA-N |
Ereztech synthesizes and sells additional SI-compounds.
To purchase SI5775 contact us at sales@ereztech.com