CAS Number 13307-05-6

For more details check the specification page: Tris(dimethylamino)chlorosilane

Chemical identifiers

Linear formula ClSi[N(CH3)2]3
Pubchem CID 83326
SMILES Cl[Si](N(C)C)(N(C)C)N(C)C
IUPAC Name N-[chloro-bis(dimethylamino)silyl]-N-methylmethanamine
InchI Identifier InChI=1S/C6H18ClN3Si/c1-8(2)11(7,9(3)4)10(5)6/h1-6H3
InchI Key YLZCZVGQEADVNK-UHFFFAOYSA-N

Safety Information

Signal word DANGER
Pictograms
UN 2986
Transport description CHLOROSILANES, CORROSIVE, FLAMMABLE, N.O.S.
Hazardous class 8(3)
Packing group II
In TSCA registry Yes
Flash point 58.9C