CAS Number 7783-61-1

For more details check the specification page: Silicon tetrafluoride

Chemical identifiers

Linear formulaSiF4
Pubchem CID24556
SMILESF[Si](F)(F)F
IUPAC Nametetrafluorosilane
InchI IdentifierInChI=1S/F4Si/c1-5(2,3)4
InchI KeyABTOQLMXBSRXSM-UHFFFAOYSA-N

Safety information

UN1859
Transport descriptionSILICON TETRAFLUORIDE
Hazardous class8(2.3)
Packing group-
In TSCA registryNo (sold for research and development usage only)