Tetrakis(diethylamino)titanium(IV)

Synonym: Tetrakis(diethylamido)titanium(IV), Titanium(IV) tetrakis(diethylamide), TDEAT, Ti(NEt₂)₄

CAS Number 4419-47-0 | MDL Number MFCD00015648 | EC Number 437-500-7

Product code	TI9470
CAS number	4419-47-0
Assay (purity)	98.5%+
Metal purity	99.99%-Ta
Purity method	by integration NMR H1
NMR H1	conforms to structure
Molecular weight	336.38 g/mol
Boiling point	112 °C (234 °F) @ 0.1 hPa (0.1 mmHg)
Form	liquid
Appearance	dark red to orange liquid
Sensitivity	moisture, heat
Molecular formula	C16H40N4Ti
Linear formula	[(C2H5)2N]4Ti
Packaging	glassware/metal containers/bubblers

Tetrakis(diethylamino)titanium(IV) was widely used as a precursor for the deposition of high-quality titanium nitride (TiN) films at low temperatures (<400 °C) using ammonia. This process of TiN formation at low temperatures (200-400°C), utilizing this product as a precursor, was reported to be applicable in microelectronics to produce barriers for the diffusion of Al and Cu, as well as “glue layers” between W and SiO₂. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI9470 contact us at sales@ereztech.com

Safety information

UN	3399
Hazardous class	4.3(3)
Packing group	I
Pictograms
Signal word	DANGER
Hazard statements	H225-H260-H314-H318
Precautionary statements	P210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport description	Organometallic substance, liquid, water-reactive, flammable (Tetrakis(diethylamino) titanium(IV)
In TSCA registry	Yes

First Aid Measures

General advice	Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contact	Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact	Wash off with soap and plenty of water. Consult a physician.
Inhalation	If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed	Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

 

Certificates of Analysis (CoA)

If you don’t see the needed lot of Tetrakis(diethylamino)titanium(IV) below please contact customer support at sales@ereztech.com

Lot# 029/028 Lot# 019/265 Lot# 026/098

External identifiers for TDEAT

Pubchem CID	123216
IUPAC Name	diethylazanide;titanium(4+)
SMILES	CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC.[Ti+4]
InchI Identifier	InChI=1S/4C4H10N.Ti/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4
InchI Key	VJDVOZLYDLHLSM-UHFFFAOYSA-N

Known applications and external links

• J.N. Musher, R.G. Gordon, J. Electrochem. Soc. 1996, vol. 143, iss. 2,736-744, doi: 10.1149/1.1836510 Atmospheric Pressure Chemical Vapor Deposition of Titanium Nitride from Tetrakis (diethylamido) Titanium and Ammonia
• X. Liu, Y.Z. Lu, R.G. Gordon, MRS. Symp. Proc, Vol. 555,  1998 , 135, Improved Conformality of CVD Titanium Nitride Films

With Tetrakis(diethylamino)titanium(IV) other customers often ask:

• Titanium(IV) methoxide
• Tetrakis(dimethylamino)titanium(IV)
• Diethylaminotitanium trichloride
• Bis(ethylcyclopentadienyl)titanium dichloride

Ereztech synthesizes and sells additional TI-compounds.

To purchase TI9470 contact us at sales@ereztech.com