Synonym: Tris(diethylamino)(ethylimino)tantalum(V), Ta(NEt)(NEt2)3

CAS Number 67313-80-8 | MDL Number MFCD03093879 | EC Number 633-181-5 


Product codeTA3808
CAS number67313-80-8
Assay (purity)99%+
Metal purity99.99%-Ta
Purity methodby gravimetric assay after ignition to oxide
NMR H1conforms to structure
Molecular weight440.40 g/mol
Appearanceyellow to amber liquid
Molecular formulaC14H35N4Ta
Linear formula[(C2H5)2N]3Ta(C2H5N)
Packagingglassware/metal containers/bubblers

Tris(diethylamido)(ethylimido)tantalum(V) has been used as a precursor for Ta2O5 thin films deposition as well as highly conformal atomic layer deposition of tantalum oxide. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA3808 contact us at

Safety information

Hazardous class3(8)
Packing groupII
Signal wordDANGER
Hazard statementsH225-H314-H318
Precautionary statementsP210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport descriptionFLAMMABLE LIQUID, CORROSIVE, N. O.S. (Tris(diethylamido)(ethylimido) tantalum(V))
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

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External identifiers for Ta(NEt)(NEt2)3

Pubchem CID4067399
IUPAC Namediethylazanide;ethyliminotantalum
InchI IdentifierInChI=1S/3C4H10N.C2H5N.Ta/c3*1-3-5-4-2;1-2-3;/h3*3-4H2,1-2H3;2H2,1H3;/q3*-1;;

Known applications and external links

With Tris(diethylamido)(ethylimido)tantalum(V) other customers often ask:

Ereztech synthesizes and sells additional TA-compounds.

To purchase TA3808 contact us at