Synonym: (tert)Butyliminotris(diethylamino)niobium, t-Butylimido tris(diethylamido)niobium(V), tris(Nethylethanaminato)[2-methyl-2-propanaminato(2-)]niobium, TBTDEN

CAS Number 210363-27-2 | MDL Number MFCD16659983  | EC Number 693-781-8

TBTDEN Chemical Structure

Product codeNB3272
CAS number210363-27-2
Assay (purity)98%+
Metal purity99.9% – Nb
Purity methodby gravimetric assay: 23.8 – 24.8 % Nb
NMR H1conforms to structure
Molecular weight380.41 g/mol
Formliquid (low melting solid)
Appearanceyellow to brown liquid (low melting solid)
Sensitivityair, moisture
Molecular formulaC16H39N4Nb
Linear formula((CH3)6N)3NbN(CH3)3
Packagingglassware/metal containers/bubblers

Tris(diethylamido)(tert-butylimido)niobium(V) is used as a niobium precursor by both thermal atomic layer deposition (ALD) and plasma-enhanced atomic layer deposition (PE-ALD) with H2O and O2 plasma as co-reactants, respectively. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing NB3272 contact us at

Safety information

Hazardous class4.3(3)
Packing groupII
PictogramsGHS02 GHS07
Signal wordDANGER
Hazard statementsH225-H261-H319-H335
Precautionary statementsP210-P223-P231 + P232-P233-P240-P241-P242-P243-P261-P264-P271-P280-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P312-P334 + P335-P337 + P313-P370 + P378
Transport descriptionOrganometallic substance, liquid, water-reactive, flammable (Tris(diethylamido)(tert-butylimido)niobium(V))
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(diethylamido)(tert-butylimido)niobium(V) below please contact customer support at

Lot# 003/555

External identifiers for TBTDEN

Pubchem CID87431252
IUPAC Nametert-butyliminoniobium; diethylazanide
InchI IdentifierInChI=1S/C4H9N.3C4H10N.Nb/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;

Known applications and external links

With Tris(diethylamido)(tert-butylimido)niobium(V) oxide other customers often ask:

Ereztech synthesizes and sells additional NB-compounds.

To purchase NB3272 contact us at