Synonym: Tris(diethylamino)(tert-butylimino)tantalum(V), Tantalum tris(diethylamido)-tert-butylimide, Tert-Butylimido Tris(DiEthylamino) Tantalum, TBTDET
CAS Number 169896-41-7 | MDL Number MFCD02684506 | EC Number 624-910-8
| Product code | TA6417 |
| CAS number | 169896-41-7 |
| Assay (purity) | 98%+ |
| Metal purity | 99.99%-Ta |
| Purity method | by integration NMR H1 |
| NMR H1 | conforms to structure |
| Molecular weight | 468.46 g/mol |
| Boiling point | 95 °C (203 °F) @ 0.7 hPa (0.5 mmHg) |
| Form | liquid |
| Appearance | colorless to yellow liquid |
| Sensitivity | air, moisture |
| Molecular formula | C16H39N4Ta |
| Linear formula | (CH3)3CNTa[N(C2H5)2]3 |
| Packaging | glassware/metal containers/bubblers |
Tris(diethylamido)(tert-butylimido)tantalum(V) was involved as a precursor in the atomic layer deposition of films, including a new route for selective deposition of thin oxide by atomic layer deposition. Plasma-enhanced ALD (PE-ALD) is considered to be very promising for the deposition of high-quality, stable, and conductive tantalum-based films. The reactants for the thALD TaxNy barrier layer deposition at 250 °C were TBTDET as precursor and ammonia as co-reactant. A novel plasma-enhanced atomic layer deposition-grown mixed-phase/nanolaminate Ru–TaN barrier has been investigated, and it was confirmed that the copper diffusion barrier and direct-plate characteristics of the mixed-phase barrier can be modulated by varying the metal ratio in the film. See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA6417 contact us at sales@ereztech.com
| UN | 3399 |
| Hazardous class | 4.3(3) |
| Packing group | II |
| Pictograms | |
| Signal word | DANGER |
| Hazard statements | H226-H261-H314-H318 |
| Precautionary statements | P210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378 |
| Transport description | Organometallic substance, liquid, water-reactive, flammable (Tris(diethylamido)(tert- butylimido) tantalum(V) |
| In TSCA registry | No (research and development usage only) |
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
If you don’t see the needed lot of Tris(diethylamido)(tert-butylimido)tantalum(V) below please contact customer support at sales@ereztech.com
Lot# 031/348 Lot# 030/143 Lot# 003/661
| Pubchem CID | 4100858 |
| IUPAC Name | tert-butyliminotantalum;diethylazanide |
| SMILES | CC[N-]CC.CC[N-]CC.CC[N-]CC.CC(C)(C)N=[Ta] |
| InchI Identifier | InChI=1S/C4H9N.3C4H10N.Ta/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1; |
| InchI Key | OAUVVCYTHMBYBP-UHFFFAOYSA-N |
Ereztech synthesizes and sells additional TA-compounds.
To purchase TA6417 contact us at sales@ereztech.com