Tris(dimethylamino)aluminum
Synonym: Tris(dimethylamido)aluminum(III), Tris(dimethylamino)aluminum dimer, Aluminum dimethylamide, 3DMAAl, (Me2N)3Al
CAS Number 32093-39-3 | MDL Number MFCD00269811 | EC Number 626-275-2
Tris(dimethylamino)aluminum, also known as 3DMAAl or Aluminum dimethylamide, is an organoaluminum compound with the molecular formula C₆H₁₈AlN₃ and a molecular weight of 159.21 g/mol. This compound features aluminum in a +3 oxidation state, coordinated with three dimethylamino ligands, forming a stable yet reactive structure. Typically appearing as white to yellow crystals, Tris(dimethylamino)aluminum has a purity level of 98%, verified by titration, and a high aluminum content of 16.6-17.3%, with a metal purity of 99.9%, confirmed by complexometric analysis. It is highly sensitive to moisture, requiring storage under an inert atmosphere to maintain stability. The compound has a melting point between 82-84°C, which facilitates its use in controlled thermal processes.
Applications in Organic and Inorganic Synthesis
Tris(dimethylamino)aluminum is widely used in organic and inorganic synthesis, particularly as a precursor in atomic layer deposition (ALD) and chemical vapor deposition (CVD) for aluminum-based thin films. Its structure, with three dimethylamino groups bonded to aluminum, makes it ideal for creating uniform coatings on semiconductor substrates, essential for applications in microelectronics. It is also valuable as a reagent in synthesis pathways requiring controlled aluminum incorporation, offering stability and reactivity for producing advanced materials.
Precautions for Safe Storage and Handling
With hazard classifications H228-1, H260, H314, H318, and H335, Tris(dimethylamino)aluminum is a flammable and water-reactive compound that poses risks of severe skin and eye irritation. Proper personal protective equipment, including gloves, goggles, and flame-resistant clothing, is recommended to prevent exposure. Storage in sealed, moisture-free containers under an inert gas, such as nitrogen or argon, is essential to avoid decomposition or ignition, particularly in environments with controlled humidity.
Industrial and Laboratory Applications
In industrial and laboratory settings, Tris(dimethylamino)aluminum is critical in high-performance material synthesis, especially in the semiconductor and microelectronics industries. It is frequently utilized as a precursor in ALD and CVD processes, where it deposits aluminum-containing films with high precision, contributing to advanced electronic device manufacturing. The controlled reactivity, high aluminum purity, and stable crystalline form of this compound make it indispensable for applications requiring accuracy and reliability in material development.
Tris(dimethylamino)aluminum is used as a precursor to aluminum nitride (AlN) thin films by organometallic chemical vapor deposition. See a link below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Tris(dimethylamino)aluminum contact us at sales@ereztech.com
Safety information
| UN | 3396 |
| Hazardous class | 4.3(4.1) |
| Packing group | I |
| Pictograms |    |
| Signal word | DANGER |
| Hazard statements | H228-H260-H314-H318-H335 |
| Precautionary statements | P210-P223-P231+P232-P240-P241-P260-P264+P265-P271-P280-P301+P330+P331-P303+P361+P353-P304+P340-P305+P351+P338-P310-P321-P335+P334-P363-P370+P378-P402+P404-P405-P501 |
| Transport description | ORGANOMETALLIC SUBSTANCE, SOLID, WATER-REACTIVE, FLAMMABLE (Tris(dimethylamino) aluminum) |
| In TSCA registry | No (sold for research and development usage only) |
First Aid Measures
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
If you don’t see the needed lot of Tris(dimethylamino)aluminum below please contact customer support at sales@ereztech.com
Lot# 030/145 Lot# 003/569 Lot# 030/080 Lot# 003/655
External identifiers for 3DMAAl
| Pubchem CID | 16688802 |
| SMILES | CN(C)[Al](N(C)C)N(C)C.CN(C)[Al](N(C)C)N(C)C |
| IUPAC Name | N-[bis(dimethylamino)alumanyl]-N-methylmethanamine |
| InchI Identifier | InChI=1S/6C2H6N.2Al/c6*1-3-2;;/h6*1-2H3;;/q6*-1;2*+3 |
| InchI Key | JGZUJELGSMSOID-UHFFFAOYSA-N |
Known applications and external links
With Tris(dimethylamino)aluminum other customers often ask:
Ereztech synthesizes and sells additional Al-compounds.
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