Tris(dimethylamino)aluminum

Synonym: Tris(dimethylamido)aluminum(III), Tris(dimethylamino)aluminum dimer, Aluminum dimethylamide, 3DMAAl, (Me₂N)₃Al

CAS Number 32093-39-3 | MDL Number MFCD00269811 | EC Number 626-275-2

Product code	AL3393
CAS number	32093-39-3
Assay (purity)	98%+
Purity method	by titration:%Al=16.6-17.3
Metal purity	99.9%-Al
Molecular weight	159.21
NMR	conforms to structure
Form	solid
Appearance	white to yellow crystals
Melting point	82-84 °C (lit.)
Sensitivity	moisture
Molecular formula	C6H18AlN3
Linear formula	Al(N(CH3)2)
Packaging	glassware/metal containers/bubblers

Tris(dimethylamino)aluminum is used as a precursor to aluminum nitride (AlN) thin films by organometallic chemical vapor deposition. See a link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Tris(dimethylamino)aluminum contact us at sales@ereztech.com

Safety information

UN	3396
Hazardous class	4.3(4.1)
Packing group	I
Pictograms
Signal word	DANGER
Hazard statements	H228-H260-H314-H318-H335
Precautionary statements	P210-P223-P231+P232-P240-P241-P260-P264+P265-P271-P280-P301+P330+P331-P303+P361+P353-P304+P340-P305+P351+P338-P310-P321-P335+P334-P363-P370+P378-P402+P404-P405-P501
Transport description	ORGANOMETALLIC SUBSTANCE, SOLID, WATER-REACTIVE, FLAMMABLE (Tris(dimethylamino) aluminum)
In TSCA registry	No (sold for research and development usage only)

First Aid Measures

General advice	Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of dangerous area.
Eye contact	Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact	Wash off with soap and plenty of water. Consult a physician.
Inhalation	If breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed	Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(dimethylamino)aluminum below please contact customer support at sales@ereztech.com

Lot# 030/145 Lot# 003/569 Lot# 030/080 Lot# 003/655

External identifiers for 3DMAAl

Pubchem CID	16688802
SMILES	CN(C)[Al](N(C)C)N(C)C.CN(C)[Al](N(C)C)N(C)C
IUPAC Name	N-[bis(dimethylamino)alumanyl]-N-methylmethanamine
InchI Identifier	InChI=1S/6C2H6N.2Al/c6*1-3-2;;/h6*1-2H3;;/q6*-1;2*+3
InchI Key	JGZUJELGSMSOID-UHFFFAOYSA-N

Known applications and external links

• • Tris (dimethylamido) aluminum (III): An overlooked atomic layer deposition precursor. Buttera SC, et al. Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, And Films 35(1), 01B128-01B128, (2017)

With Tris(dimethylamino)aluminum other customers often ask:

• • • Tris(acetylacetonato)aluminium
    • Aluminum ethoxide
    • Tris(diethylamino)aluminum(III)

Ereztech synthesizes and sells additional Al-compounds.

To purchase Tris(dimethylamino)aluminum contact us at sales@ereztech.com