Tris(ethylcyclopentadienyl)yttrium

Synonym: Y(EtCp)₃, Tris(2-ethyl-2,4-cyclopentadienyl) yttrium

CAS Number 476364-59-7 | EC Number 810-917-5 

Product code	Y4597
CAS number	476364-59-7
Assay (purity)	98%
Metal purity	Y-99.9%
Purity method	by titration: complexometric, %Y=23.5-25.0
Molecular weight	368.34 g/mol
Form	solid
Appearance	yellow crystals
Sensitivity	air, moisture
Molecular formula	C21H27Y
Lineal formula	(C2H5C5H4)3Y
Packaging	glassware/metal containers/bubblers

Tris(ethylcyclopentadienyl)yttrium,combined with H2O vapor as oxygen source, was used for the deposition of  yttria Y2O3 thin films on Si by ALD; the precursor evaporation conditions were 120°C/ 0.6-2 mbar. Film growth kinetics was investigated; the growth rate was constant with number of deposition cycles, at optimal ALD conditions being 1.7±0.1 Å/cycle. However, the gradual increase in growth rate was observed when increasing the reactor temperature from 200 to 400°C, with a narrow plateau at ca.~250–285°C. Y2O3 films were stoichiometric with no detectable C contamination as per XPS data); as-deposited Y2O3 layers were polycrystalline (according to glancing incidence XRD). See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Y4597 contact us at sales@ereztech.com

Safety information

UN	3395
Hazardous class	4.3
Packing group	II
Pictogram
Signal word	DANGER
Hazard statements	H228-H261
Precautionary statements	P210-P223-P231 + P232-p240-P241-P280
Transport description	ORGANOMETALLIC SUBSTANCE, SOLID, WATER-REACTIVE (TRIS (ETHYLCYCLOPENTADIENYL) YTTRIUM)
In TSCA registry	No, sold for research and development usage only

First Aid Measures

General advice	Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contact	Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact	Wash off with soap and plenty of water. Consult a physician.
Inhalation	If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed	Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

 

Certificates of Analysis (CoA)

Lot#031/357 Lot# 031/391 Lot# 031/434

External identifiers for Y(EtCp)3

Pubchem CID	101468254
SMILES	CCC1=CC=C[CH]1.CCC1=CC=C[CH]1.CCC1=CC=C[CH]1.[Y]
IUPAC Name	1-ethylcyclopenta-1,3-diene; yttrium
InchI Identifier	InChI=1S/3C7H9.Y/c3*1-2-7-5-3-4-6-7;/h3*3-6H,2H2,1H3;
InchI Key	JHFCTJHPQRVPAJ-UHFFFAOYSA-N

Known applications and external links

• Prodyut Majumder, Gregory Jursich, Adam Kueltzo, Christos Takoudis. Atomic Layer Deposition of Y[sub 2]O[sub 3] Films on Silicon Using Tris(ethylcyclopentadienyl) Yttrium Precursor and Water Vapor. Journal of The Electrochemical Society 2008, 155, G152. DOI: 10.1149/1.2929825.
• Prodyut Majumder, Gregory Jursich, Adam Kueltzo, Christos Takoudis,  J. Electrochem. Soc., Volume 155, Issue 8, pp. G152-G158 (2008) Atomic Layer Deposition of Y2O3 Films on Silicon Using Tris(ethylcyclopentadienyl) Yttrium Precursor and Water Vapor

With Yttrium Ethylcyclopentadienyl other customers often ask:

• Tris(cyclopentadienyl)yttrium(III)
• Tris(methylcyclopentadienyl)yttrium(III)
• Tris(n-butylcyclopentadienyl)yttrium(III)
• Tris(isopropylcyclopentadienyl)yttrium(III)

Ereztech synthesizes and sells additional Y-compounds.

To purchase Tris(ethylcyclopentadienyl)yttrium CAS 476364-59-7 contact us at sales@ereztech.com