Synonym: (Tert-butylimido)tris(ethylmethylamido)tantalum(V), (t-butylimido)tris(ethylmethylamido)tantalum(V), (tert-Butylimino)[tris(N-methylethanaminato)]tantalum, TBTEMT

CAS Number 511292-99-2 | MDL Number MFCD05663776 | EC Number 633-032-4

TBTEMT chemical structure

Product codeTA2992
CAS number511292-99-2
Assay (purity)99%+
Metal purity99.99%-Ta
Purity methodby gravimetric assay after ignition to oxide
NMR H1conforms to structure
Molecular weight426.38 g/mol
Boiling point208 °F (98.0 °C) @ 2.4 hPa (1.8 mmHg)
Appearancelight yellow liquid
Sensitivityair, moisture
Molecular formulaC13H33N4Ta
Linear formula[(C2H5)N(CH3)]3TaNC(CH3)3
Packagingglassware/metal containers/bubblers

Tris(ethylmethylamido)(tert-butylimido)tantalum(V) has been used as a precursor for the deposition of TaN thin films using plasma enhanced atomic layer deposition (PEALD) technique. The TaN films deposited by PEALD exhibited a lower resistivity of 200 – 500 μΩ-cm compared to thermally deposited ALD TaN films (> 1000.μΩ-cm). The density increases to 11-13 g/cm3 compared to 9 g/cm3 for thermal ALD films. See link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA2992 contact us at

Safety information

Hazardous class4.3(3)
Packing groupII
Signal wordDANGER
Hazard statementsH225-H261-H314-H318
Precautionary statementsP210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport descriptionOrganometallic substance, liquid, water-reactive, flammable (Tris(ethylmethylamido) (tert-butylimido) tantalum(V)
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(ethylmethylamido)(tert-butylimido)tantalum(V) below please contact customer support at

Lot# 030/115

External identifiers for TBTEMT

Pubchem CID4643325
IUPAC Nametert-butyliminotantalum; ethyl(methyl)azanide
InchI IdentifierInChI=1S/C4H9N.3C3H8N.Ta/c1-4(2,3)5;3*1-3-4-2;/h1-3H3;3*3H2,1-2H3;/q;3*-1;

Known applications and external links

With Tris(ethylmethylamido)(tert-butylimido)tantalum(V) other customers often ask:

Ereztech synthesizes and sells additional TA-compounds.

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