(3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl
Synonym: Dicobalt Hexacarbonyl Tert-ButylAcetylene, Dicobalt hexacarbonyl t-butylacetylen, Hexacarbonyl(3,3-dimethyl-1-butyne)dicobalt, CCTBA
CAS Number 56792-69-9 | MDL Number MFCD00054408
(3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl has been used as a precursor of Co films deposited by plasma-enhanced atomic layer deposition (PEALD) for Cu direct plating. The electrical properties of PEALD Co films of sub-20 nm thickness were determined by assessing continuities, morphologies, and impurities. To decrease the resistivity of Co films, a TaNx substrate was pre-treated with H2 plasma and the flow rate of H2 gas during CCTBA feeding and reactant feeding pulses was increased. Co films were deposited on a 3 nm-thick TaNx-covered SiO2 substrate with 24 nm-deep trenches, and Cu direct plating was successfully performed under conventional conditions. Cobalt is an important component of thin layers used in microelectronics like magnetoresistive devices, integrated circuits as well as lithium battery technologies and spintronics. See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing (3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl contact us at sales@ereztech.com
Safety information
UN | NA 1993 |
Hazardous class | 3 |
Packing group | III |
Pictograms | |
Signal word | DANGER |
Hazard statements | H227-H302-H312-H315-H317-H319-H332-H334-H351-H361-H412 |
Precautionary statements | P201-P202-P210-P261-P264-P270-P271-P272-P273-P280-P281-P285 |
Transport description | Combustible liquid, n.o.s. (Dicobalt hexacarbonyl tert- butylacetylene) |
In TSCA registry | No (sold for research and development usage only) |
First Aid Measures
General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
Skin contact | Wash off with soap and plenty of water. Consult a physician. |
Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
If you don’t see the needed lot of (3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl below please contact customer support at sales@ereztech.com
Lot# 005/537 Lot#013/013 Lot#013/014 Lot# 031/422 Lot# 022/023 Lot# 017/250 Lot# 017/251 Lot# 017/252 Lot# 017/253 Lot# 017/254 Lot# 017/255
External identifiers for CCTBA
Pubchem CID | 90473603 |
SMILES | CC(C)(C)C#C.[C-]#[O+].[C-]#[O+].[C-]#[O+].[C-]#[O+].[C-]#[O+].[C-]#[O+].[Co].[Co] |
IUPAC Name | carbon monoxide; cobalt; 3,3-dimethylbut-1-yne |
InchI Identifier | InChI=1S/C6H10.6CO.2Co/c1-5-6(2,3)4;6*1-2;;/h1H,2-4H3;;;;;;;; |
InchI Key | ZJCVAZZKJPVOPY-UHFFFAOYSA-N |
Known applications and external links
- Jae-HyungParkaDae-YongMoonaDong-SukHanaYu-JinKangaSo-RaShinbHyung-TagJeonbJong-WanPark Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating. Surface and Coatings Technology Volume 259, Part A, 25 November 2014, Pages 98-101.
- G.A. Seisenbaeva, E.V. Suslova, M.Kritikos, V.G. Kessler, L.Rapenne, M.Andrieux, F. Chassagneux, S.Parola, J. Mater. Chem., 2004, 14, 3150-3157, “Purposeful construction versus self-assembly in approaches to single source precursors of spinel materials. Synthesis, structure and stability studies of MIIAl2(acac)3(OiPr)4(OAc), MII = Mn, Co, Zn – a new class of heterometallic heteroleptic alkoxide complexes”
With (3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl other customers often ask:
- Dicobalt Octacarbonyl (stabilised with 1-5% Hexane)
- Cobalt tricarbonyl nitrosyl
- Bis(cyclopentadienyl)cobalt
- Dicarbonylcyclopentadienylcobalt
Ereztech synthesizes and sells additional CO-compounds.
To purchase (3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl contact us at sales@ereztech.com