CAS Number 13307-05-6
  For more details check the specification page: Tris(dimethylamino)chlorosilane
Chemical identifiers
| Linear formula | ClSi[N(CH3)2]3 | 
| Pubchem CID | 83326 | 
| SMILES | Cl[Si](N(C)C)(N(C)C)N(C)C | 
| IUPAC Name | N-[chloro-bis(dimethylamino)silyl]-N-methylmethanamine | 
| InchI Identifier | InChI=1S/C6H18ClN3Si/c1-8(2)11(7,9(3)4)10(5)6/h1-6H3 | 
| InchI Key | YLZCZVGQEADVNK-UHFFFAOYSA-N | 
Safety information
| Signal word | DANGER | 
| Pictograms | |
| Hazard statements | H226, H314 | 
| Precautionary statements | P210, P233, P240, P241, P242, P243, P260, P264, P280, P301+P330+P331, P303+P361+P353, P304+P340, P305+P351+P338, P310, P321, P363, P370+P378, P403+P235, P405, P501 | 
| UN | 2986 | 
| Transport description | CHLOROSILANES, CORROSIVE, FLAMMABLE, N.O.S. | 
| Hazardous class | 8(3) | 
| Packing group | II | 
| In TSCA registry | Yes | 
| Flash point | 58.9C | 

 
 