Tetrakis(diethylamino)titanium(IV)
Synonym: Tetrakis(diethylamido)titanium(IV), Titanium(IV) tetrakis(diethylamide), TDEAT, Ti(NEt2)4
CAS Number 4419-47-0 | MDL Number MFCD00015648 | EC Number 437-500-7
Tetrakis(diethylamino)titanium(IV) was widely used as a precursor for the deposition of high-quality titanium nitride (TiN) films at low temperatures (<400 °C) using ammonia. This process of TiN formation at low temperatures (200-400°C), utilizing this product as a precursor, was reported to be applicable in microelectronics to produce barriers for the diffusion of Al and Cu, as well as “glue layers” between W and SiO2. See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI9470 contact us at sales@ereztech.com
Safety information
| UN | 3399 |
| Hazardous class | 4.3(3) |
| Packing group | I |
| Pictograms |   |
| Signal word | DANGER |
| Hazard statements | H225-H260-H314-H318 |
| Precautionary statements | P210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378 |
| Transport description | Organometallic substance, liquid, water-reactive, flammable (Tetrakis(diethylamino) titanium(IV) |
| In TSCA registry | Yes |
First Aid Measures
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
If you don’t see the needed lot of Tetrakis(diethylamino)titanium(IV) below please contact customer support at sales@ereztech.com
Lot# 029/028 Lot# 019/265 Lot# 026/098
External identifiers for TDEAT
| Pubchem CID | 123216 |
| IUPAC Name | diethylazanide;titanium(4+) |
| SMILES | CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC.[Ti+4] |
| InchI Identifier | InChI=1S/4C4H10N.Ti/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4 |
| InchI Key | VJDVOZLYDLHLSM-UHFFFAOYSA-N |
Known applications and external links
- J.N. Musher, R.G. Gordon, J. Electrochem. Soc. 1996, vol. 143, iss. 2,736-744, doi: 10.1149/1.1836510 Atmospheric Pressure Chemical Vapor Deposition of Titanium Nitride from Tetrakis (diethylamido) Titanium and Ammonia
- X. Liu, Y.Z. Lu, R.G. Gordon, MRS. Symp. Proc, Vol. 555, 1998 , 135, Improved Conformality of CVD Titanium Nitride Films
With Tetrakis(diethylamino)titanium(IV) other customers often ask:
- Titanium(IV) methoxide
- Tetrakis(dimethylamino)titanium(IV)
- Diethylaminotitanium trichloride
- Bis(ethylcyclopentadienyl)titanium dichloride
Ereztech synthesizes and sells additional TI-compounds.
To purchase TI9470 contact us at sales@ereztech.com
