Synonym: Ti(EtCp)2Cl2, Dichlorobis(ethylcyclopentadienyl)titanium
CAS Number 35625-75-3 | MDL Number MFCD1862447 | EC Number 636-854-1
| Product code | TI5753 |
| CAS number | 35625-75-3 |
| Assay (purity) | 97%+ |
| Purity method | by elemental analysis: %C=53.5-56.8; %H=5.8-6.1 |
| NMR H1 | conforms to structure |
| Molecular weight | 305.08 g/mol |
| Melting point | 137 to 140°C (278.6 to 284°F) |
| Form | solid |
| Appearance | red-brown crystals |
| Sensitivity | moisture |
| Molecular formula | C14H18Cl2Ti |
| Linear formula | [(C2H5)C5H4]2TiCl2 |
| Packaging | glassware/metal containers/bubblers |
Bis(ethylcyclopentadienyl)titanium(IV) dichloride is a novel titanium precursor for forming of the high-k dielectric films, used in semiconductor manufacturing. See link below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI5753 contact us at sales@ereztech.com
| UN | 3261 |
| Hazardous class | 8 |
| Packing group | II |
| Pictograms | |
| Signal word | DANGER |
| Hazard statements | H315-H319-H335 |
| Precautionary statements | P222-P231-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378 |
| Transport description | Corrosive solid, acidic, organic, n.o.s. (bis(ethylcyclopentadienyl)titanium(IV) dichloride |
| In TSCA registry | No (research and development usage only) |
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
If you don’t see the needed lot of Bis(ethylcyclopentadienyl)titanium(IV) dichloride below please contact customer support at sales@ereztech.com
| Pubchem CID | 56846575 |
| IUPAC Name | 2-ethylcyclopenta-1,3-diene;titanium(4+);dichloride |
| SMILES | CCC1=[C-]CC=C1.CCC1=[C-]CC=C1.[Cl-].[Cl-].[Ti+4] |
| InchI Identifier | InChI=1S/2C7H9.2ClH.Ti/c2*1-2-7-5-3-4-6-7;;;/h2*3,5H,2,4H2,1H3;2*1H;/q2*-1;;;+4/p-2 |
| InchI Key | NDYCJOIYEZKDPF-UHFFFAOYSA-L |
Ereztech synthesizes and sells additional TI-compounds.
To purchase TI5753 contact us at sales@ereztech.com