Synonym: Tetrakis(diethylamido)titanium(IV), Titanium(IV) tetrakis(diethylamide), TDEAT, Ti(NEt2)4

CAS Number 4419-47-0 | MDL Number MFCD00015648 | EC Number 437-500-7


Product codeTI9470
CAS number4419-47-0
Assay (purity)98.5%+
Metal purity99.99%-Ta
Purity methodby integration NMR H1
NMR H1conforms to structure
Molecular weight336.38 g/mol
Boiling point112 °C (234 °F) @ 0.1 hPa (0.1 mmHg)
Appearancedark red to orange liquid
Sensitivitymoisture, heat
Molecular formulaC16H40N4Ti
Linear formula[(C2H5)2N]4Ti
Packagingglassware/metal containers/bubblers

Tetrakis(diethylamino)titanium(IV) was widely used as a precursor for the deposition of high-quality titanium nitride (TiN) films at low temperatures (<400 °C) using ammonia. This process of TiN formation at low temperatures (200-400°C), utilizing this product as a precursor, was reported to be applicable in microelectronics to produce barriers for the diffusion of Al and Cu, as well as “glue layers” between W and SiO2. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI9470 contact us at sales@ereztech.com

Safety information

Hazardous class4.3(3)
Packing groupI
Signal wordDANGER
Hazard statementsH225-H260-H314-H318
Precautionary statementsP210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport descriptionOrganometallic substance, liquid, water-reactive, flammable (Tetrakis(diethylamino) titanium(IV)
In TSCA registryYes

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Tetrakis(diethylamino)titanium(IV) below please contact customer support at sales@ereztech.com

Lot# 029/028 Lot# 019/265 Lot# 026/098

External identifiers for TDEAT

Pubchem CID123216
IUPAC Namediethylazanide;titanium(4+)
InchI IdentifierInChI=1S/4C4H10N.Ti/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4

Known applications and external links

With Tetrakis(diethylamino)titanium(IV) other customers often ask:

Ereztech synthesizes and sells additional TI-compounds.

To purchase TI9470 contact us at sales@ereztech.com