Synonym: Bis(tert-butylimino)bis(dimethylamino)molybdenum(VI), Bis(t-butylimido)bis(dimethylamido)molybdenum(VI), (tBuN)2(NMe2)2Mo
CAS Number 923956-62-1 | MDL Number MFCD28411640 | EC Number 632-998-4
| Product code | MO6621 |
| CAS number | 923956-62-1 |
| Assay (purity) | 98%+ |
| NMR H1 | conforms to structure |
| Purity method | by integration NMR |
| Molecular weight | 326.34 g/mol |
| Form | liquid |
| Appearance | orange liquid |
| Boiling point | 61.0°C (142°F) @ 0.01 – 0.03 mmHg |
| Flash point | 0°C (32°F) |
| Sensitivity | air, moisture, heat |
| Molecular formula | C12H30N4Mo |
| Linear formula | C12H30N4Mo |
| Packaging | glassware/metal containers/bubblers |
Bis(t-butylimido)bis(dimethylamino)molybdenum(VI) is a molybdenum-based organometallic compound used as a precursor for semiconductors applications. Molybdenum carbonitride films were deposited using plasma-enhanced atomic layer deposition techniques with (tBuN)2(NMe2)2Mo at temperatures ranging from 80 to 300 °C. The elemental composition of the molybdenum carbonitride films were analyzed using x-ray photoelectron spectroscopy with a MoCxNy composition extending from carbide, MoC0.45N0.08 to nitride MoC0.06N1.40 (x: 0.06–0.45; y: 0.08–1.40). See link below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing MO6621 contact us at sales@ereztech.com
| UN | 3399 |
| Hazardous class | 4.3(3) |
| Packing group | I |
| Pictograms | |
| Signal word | DANGER |
| Hazard statements | H226-H260-H314-H318 |
| Precautionary statements | P210-P223-P231 + P232-P233-P240-P241-P242-P243-P260-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378 |
| Transport description | Organometallic substance, liquid, water- reactive, flammable (Bis(t-butylimido) bis(dimethylamino) molybdenum(VI)) |
| In TSCA registry | No (research and development usage only) |
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
If you don’t see the needed lot of Bis(t-butylimido)bis(dimethylamino)molybdenum(VI) below please contact customer support at sales@ereztech.com
| Pubchem CID | 102402556 |
| IUPAC Name | dimethylazanide;2-λ1-azanyl-2-methylpropane;molybdenum(2+) |
| SMILES | CC(C)(C)[N].CC(C)(C)[N].C[N-]C.C[N-]C.[Mo+2] |
| InchI Identifier | InChI=1S/2C4H9N.2C2H6N.Mo/c2*1-4(2,3)5;2*1-3-2;/h2*1-3H3;2*1-2H3;/q;;2*-1;+2 |
| InchI Key | KUMGWCYRXZGGGP-UHFFFAOYSA-N |
Ereztech synthesizes and sells additional MO-compounds.
To purchase MO6621 contact us at sales@ereztech.com