Synonym: Bis(tert-butylimino)bis(dimethylamino)molybdenum(VI), Bis(t-butylimido)bis(dimethylamido)molybdenum(VI), (tBuN)2(NMe2)2Mo

CAS Number 923956-62-1 | MDL Number MFCD28411640 | EC Number 632-998-4

Product codeMO6621
CAS number923956-62-1
Assay (purity)98%+
NMR H1conforms to structure
Purity methodby integration NMR
Molecular weight326.34 g/mol
Appearanceorange liquid
Boiling point61.0°C (142°F) @ 0.01 – 0.03 mmHg
Flash point0°C (32°F)
Sensitivityair, moisture, heat
Molecular formulaC12H30N4Mo
Linear formulaC12H30N4Mo
Packagingglassware/metal containers/bubblers

Bis(t-butylimido)bis(dimethylamino)molybdenum(VI) is a molybdenum-based organometallic compound used as a precursor for semiconductors applications. Molybdenum carbonitride films were deposited using plasma-enhanced atomic layer deposition techniques with (tBuN)2(NMe2)2Mo at temperatures ranging from 80 to 300 °C. The elemental composition of the molybdenum carbonitride films were analyzed using x-ray photoelectron spectroscopy with a MoCxNy composition extending from carbide, MoC0.45N0.08 to nitride MoC0.06N1.40 (x: 0.06–0.45; y: 0.08–1.40).  See link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing MO6621 contact us at

Safety information

Hazardous class4.3(3)
Packing groupI
Signal wordDANGER
Hazard statementsH226-H260-H314-H318
Precautionary statementsP210-P223-P231 + P232-P233-P240-P241-P242-P243-P260-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport descriptionOrganometallic substance, liquid, water- reactive, flammable (Bis(t-butylimido) bis(dimethylamino) molybdenum(VI))
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Bis(t-butylimido)bis(dimethylamino)molybdenum(VI) below please contact customer support at

Lot# 003/565 Lot# 003/609

External identifiers for (tBuN)2(NMe2)2Mo

Pubchem CID102402556
IUPAC Namedimethylazanide;2-λ1-azanyl-2-methylpropane;molybdenum(2+)
InchI IdentifierInChI=1S/2C4H9N.2C2H6N.Mo/c2*1-4(2,3)5;2*1-3-2;/h2*1-3H3;2*1-2H3;/q;;2*-1;+2

Known applications and external links

With Bis(t-butylimido)bis(dimethylamino)molybdenum(VI) other customers often ask:

Ereztech synthesizes and sells additional MO-compounds.

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