Diethylaminotitanium trichloride
Synonym: Titanium trichloride diethylamide, Trichloro(diethylamino)titanium (IV), TiCl3(NEt2)
CAS Number 684-55-9 | EC Number 810-139-6
Diethylaminotitanium trichloride was applied for the ALD growth of TiN thin films. The films grown using halide amino metal precursors contained lower concentrations of Cl in the film compared to TiN layers deposited with TiCl4. Additional testing revealed a potential preference for TiCl3(NEt2), which is more thermally stable and has reasonable vapor pressure ~0.28 Torr/ 75° C, with TiCl3(NMe2). See link below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI4559 contact us at sales@ereztech.com
Safety information
| UN | 3396 |
| Hazardous class | 4.3 |
| Packing group | II |
| Pictograms |   |
| Signal word | DANGER |
| Hazard statements | H261-H314-H318-H335 |
| Precautionary statements | P223-P231 + P232-P260-P264-P271-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378 |
| Transport description | Organometallic substance, solid, water-reactive, flammable Diethylaminotitanium trichloride |
| In TSCA registry | No (research and development usage only) |
First Aid Measures
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
If you don’t see the needed lot of Diethylaminotitanium trichloride below please contact customer support at sales@ereztech.com
Known applications and external links
With Diethylaminotitanium trichloride other customers often ask:
- Titanium(IV) methoxide
- Tetrakis(dimethylamino)titanium(IV)
- Bis(ethylcyclopentadienyl)titanium dichloride
- Tetrakis(diethylamino)titanium
Ereztech synthesizes and sells additional TI-compounds.
To purchase TI4559 contact us at sales@ereztech.com
