Synonym: 1,1,1,2,2,2-Hexachlorodisilane, Disilicon hexachloride, HCDS

CAS Number 13465-77-5 | MDL Number MFCD00011599 | EC Number 236-704-1

HCDS Chemical Structure

Product codeSI5775
CAS number13465-77-5
Assay (purity)99.9%+
Metal purity99.99% – Si
Purity methodby GC
Molecular weight268.88 g/mol
Appearancecolorless liquid
Melting point-1°C (30.2°F)
Boiling point144 to 145.5°C (291.2 to 293.9°F)
Molecular formulaSi2Cl6
Linear formula(SiCl3)2
Packagingglassware/metal containers/bubblers

Hexachlorodisilane and atomic hydrogen have been used for Atomic layer epitaxy of Si on Ge(100). Hexachlorodisilane may be used as a reducing agent. Hexachlorodisilane may be combined with ammonia to form silicon nitride by chemical vapor deposition. A plasma-enhanced atomic layer deposition (ALD) process was developed for the growth of SiNx thin films using Si2Cl6 and NH3 plasma. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing SI5775 contact us at sales@ereztech.com

Safety information

Hazardous class8
Packing groupII
Signal wordDANGER
Hazard statementsH314-H318
Precautionary statementsP280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340 + P310-P305 + P351 + P338 + P310-P363
Transport descriptionChlorosilanes, corrosive, n.o.s.
In TSCA registryYes

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Hexachlorodisilane below please contact customer support at sales@ereztech.com

Lot# 603/104

External identifiers for HCDS

Pubchem CID83497
IUPAC Nametrichloro(trichlorosilyl)silane
InchI IdentifierInChI=1S/Cl6Si2/c1-7(2,3)8(4,5)6

Known applications and external links

With Hexachlorodisilane other customers often ask:

Ereztech synthesizes and sells additional SI-compounds.

To purchase SI5775 contact us at sales@ereztech.com