Silicon tetraiodide

Synonym: Tetraiodosilane, Silicon Iodide, Silicon(IV) iodide

CAS Number 13465-84-4 | MDL Number MFCD00054041 | EC Number 236-706-2

Tetraiodosilane Chemical Structure

Product codeSI5844
CAS number13465-84-4
Assay (purity)99%+
Metal purity99.999% – Si
Purity methodby titration (%Si=5.239)
Molecular weight535.70 g/mol
Melting point120.5°C (248.9°F)
Boiling point287.4°C (549.3°F)
Appearanceoff-white powder or crystals
Molecular formulaSiI4
Linear formulaSiI4
Packagingglassware/metal containers/bubblers

Silicon tetraiodide applies for the manufacturing and etching of silicon wafers used in microfabrication of electronic related components. This product has been used for the syntheses of Tetrakis(dialkylamino)silanes. SiI4 was proposed as a potential precursor for the deposition of Si-based films by CVD. SiI4 is advantageous, as it is a simple Si-contaning precursor which can be used in thermally or UV-assisted CVD deposition processes. SiI4 has a simple structure and does not require laborious synthetic procedures. Tetraiodosilane also provides high film growth rates and low minimum film deposition temperatures. See link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing SI5844 contact us at

Safety information

Hazardous class8 (6.1)
Packing groupII
PictogramsGHS06 GHS08
Signal wordDANGER
Hazard statementsH301 + H311-H314-H317-H334-H360
Precautionary statementsP201-P202-P260-P264-P270-P271-P280-P303 + P361 + P353-P305 + P351 + P338-P312-P334 + P335-P337 + P313-P363
Transport descriptionCORROSIVE SOLID, TOXIC, N.O.S. (Silicon tetraiodide)
In TSCA registryYes

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Silicon tetraiodide below please contact customer support at

Lot# 234/R/01/G/0918 Lot# 234/R/01/0918 Lot# 234/R/10/SiG5/0219

External identifiers for Tetraiodosilane

Pubchem CID83498
IUPAC Nametetraiodosilane
InchI IdentifierInChI=1S/I4Si/c1-5(2,3)4

Known applications and external links

With Silicon tetraiodide oxide other customers often ask:

Ereztech synthesizes and sells additional SI-compounds.

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