Tetrakis(1-methoxy-2-methyl-2-propoxy) zirconium

Synonym: Zirconium tetrakis(methoxymethylpropanolate), Zirconium(MMP)₄, ZR(MMP)₄

CAS Number 615287-00-8 

Product code	ZR7008
CAS number	615287-00-8
Assay (purity)	98%+
Purity method	by integration NMR H1
NMR H1	conforms to structure
Molecular weight	503.79 g/mol
Boiling point	142 °C (287.6 °F)
Form	liquid or solid
Appearance	white viscous liquid or yellow solid
Sensitivity	moisture
Molecular formula	C20H44O8Zr
Linear formula	Zr(OC(CH3)2CH2OCH3)4
Packaging	glassware/metal containers/bubblers

Tetrakis(1-methoxy-2-methyl-2-propoxy) zirconium is a new Zr alkoxide precursor that has been used, together with Zr(OtBu)₂(mmp)₂, for deposition of ZrO₂ thin films by liquid injection metal-organic (MO)CVD. PbZr_(x)Ti_(1-x)O₃ (PZT) thin films were deposited on 3-dimensional nano-scale trench structures for use in giga-bit density ferroelectric random access memories. PZT thin films were deposited by liquid delivery metalorganic chemical vapor deposition using Pb(thd)₂, Zr(MMP)₄, and Ti(MMP)₄ precursors dissolved in ethyl cyclohexane. Zr(MMP)₄, dissolved together with Pb(DMAMP)₂ and Ti(MMP)₄ in the ethylcyclohexane solvent (a “cocktail” solution), was applied for the growth of ferroelectric PbZrTiO_x thin films by liquid delivery MOCVD. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing ZR7008 contact us at sales@ereztech.com

Safety information

UN	1993
Hazardous class	–
Packing group	III
Pictograms	None
Signal word	WARNING
Hazard statements	H227
Precautionary statements	P210-P280-P370 + P378-P403 + P235
Transport description	Combustible liquid, n.o.s. (Tetrakis(1- methoxy-2-methyl-2- propoxy)zirconium(IV))
In TSCA registry	No (research and development usage only)

 

Certificates of Analysis (CoA)

If you don’t see the needed lot of Tetrakis(1-methoxy-2-methyl-2-propoxy) zirconium below please contact customer support at sales@ereztech.com

Lot# 015/823

Known applications and external links

• Shin S, Koo JM, Kim S, Seo BS, Lee JH, Baik H, Park Y, Han H, Baik S, Lee JK. Fabrication of 3-dimensional PbZr(1-x)Ti(x)O3 nanoscale thin film capacitors for high density ferroelectric random access memory devices. J Nanosci Nanotechnol. 2006 Nov;6(11):3333-7.
• P. A. Williams, J. L. Roberts, A. C. Jones, P. R. Chalker, N. L. Tobin, J. F. Bickley, H. O. Davies, L. M. Smith, T. J. Leedham. Novel Mononuclear Alkoxide Precursors for the MOCVD of ZrO2 and HfO2 Thin Films

With Tetrakis(1-methoxy-2-methyl-2-propoxy) zirconium other customers often ask:

• [Dimethylbis(cyclopentadienyl)silyl]zirconium dichloride
• Zirconium(IV)isopropoxide
• Zirconium(IV)ethoxide
• Zirconium tetrakis(2,2,6,6-tetramethyl- 3,5-heptanedionate)

Ereztech synthesizes and sells additional ZR-compounds.

To purchase ZR7008 contact us at sales@ereztech.com