Titanium(IV) diisopropoxide bis(dimethylaminoethoxide)

Synonym: Titanium bis(dimethylaminoethoxide) bis(isopropoxide), Ti(Oi-Pr)₂(dmae)₂

CAS Number 52406-69-6 

Product code	TI6696
CAS number	52406-69-6
Assay (purity)	98%
Purity method	by elemental analysis: % C = 47.9 – 50.3; % H = 9.8 – 10.3
NMR H1	conforms to structure
Molecular weight	342.32 g/mol
Form	liquid or solid
Appearance	colorless oily liquid or solid
Sensitivity	air, moisture
Molecular formula	C14H34O4N2Ti
Linear formula	Ti(OC3H7)2[OCH2CH2N(CH3)2]2
Packaging	glassware/metal containers/bubblers

Titanium(IV) diisopropoxide bis(dimethylaminoethoxide) is a useful as precursor for the deposition of TiO2 layers by MOCVD and ALD. This complex was tested as a precursor for the liquid injection MOCVD growth of TiO2 layers at 300-450°C temperatures. This product was applied as a Ti precursor (with H2O as co-precursor) for the deposition of TiO2 layers on Si(100) substrates by ALD. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI6696 contact us at sales@ereztech.com

Safety information

UN	Not regulated
Hazardous class	Not regulated
Packing group	Not regulated
Pictograms
Signal word	WARNING
Hazard statements	H315-H319-H335
Precautionary statements	P261-P264-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338-P312-P332 + P313-P337 + P313-P362
Transport description	NONH for all modes of transport
In TSCA registry	No (research and development usage only)

 

Certificates of Analysis (CoA)

If you don’t see the needed lot of Titanium(IV) diisopropoxide bis(dimethylaminoethoxide) below please contact customer support at sales@ereztech.com

Lot# 015/825

Known applications and external links

• Anthony C. Jones, Timothy J. Leedham, Peter J. Wright, Michael J. Crosbie, Kirsty A. Fleeting, David J. Otway, Paul O’Brien, Martyn E. Pemble. Synthesis and characterization of two novel titanium isopropoxides stabilized with a chelating alkoxide: their use in the liquid injection MOCVD of titanium dioxide thin films
• J.P. Lee, M.H. Park, T.-M. Chung, Y.-S. Kim, M.M. Sung, Bull. Korean Chem. Soc., 2004 Vol.25, Iss.4, p.475-479, «  Atomic Layer Deposition of TiO2 Thin Films from Ti(OiPr)2(dmae)2 and H2O
• Timothee Blanquart, Jaakko Niinistö, Marco Gavagnin, Valentino Longo, Venkateswara R. Pallem∥, Christian Dussarrat∥, Mikko Ritala, Markku Leskelä. Novel Heteroleptic Precursors for Atomic Layer Deposition of TiO2

With Titanium(IV) diisopropoxide bis(dimethylaminoethoxide) other customers often ask:

• Tetrakis(diethylamino)titanium
• Bis(ethylcyclopentadienyl)titanium dichloride
• Diethylaminotitanium trichloride
• Titanium(IV) methoxide, Ti(OMe)4

Ereztech synthesizes and sells additional TI-compounds.

To purchase TI6696 contact us at sales@ereztech.com