Synonym: TDEAA, Tris(diethylamino)alane, Tris(diethylamido)aluminum, Tris(diethyl-amino)aluminum(III), Tris(diethylamino)alane, Aluminum Diethylazanide, Al(NEt2)3
CAS Number 352546-72-6 | MDL Number MFCD03458803
| Product code | AL6726 |
| CAS number | 352546-72-6 |
| Assay (purity) | 98%+ |
| Purity method | by integration NMR H1: % Cl ̄ < 3 ppm |
| NMR | conforms to structure |
| Molecular weight | 486.74 g/mol |
| Form | liquid |
| Appearance | yellow liquid |
| Melting point | 28 – 31 °C (82.4 – 87.8 °F) |
| Boiling point | 50 °C (122 °F) |
| Flash point | 21 °C (69.8 °F) |
| Sensitivity | air, moisture, heat |
| Molecular formula | C12H30AlN3 |
| Linear formula | Al(N(C2H5)2)3 |
| Packaging | glassware/metal containers/bubblers |
Tris(diethylamido)aluminum is a non-pyrophoric liquid aluminum precursor. This product was proposed as Al precursor for the Al2O3 deposition by ALD, as well as for the growth of HfAlO films in cocktail mixture with Hf(NEt2)4. It is also was shown to be a useful precursor to aluminum nitride (AlN) thin films by MOCVD. See link below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Tris(diethylamino)aluminum(III) contact us at sales@ereztech.com
| UN | 3399 |
| Hazardous class | 4.3(3) |
| Packing group | I |
| Pictograms | |
| Signal word | DANGER |
| Hazard statements | H225-H260-H314-H318-H335 |
| Precautionary statements | P210-P223-P231 + P232-P233-P240-P241-P242-P243-P260-P264-P280-P301 + P330 + P331-P303 + P361 + P353 |
| Transport description | Organometallic substance, liquid, water-reactive, flammable (Tris(diethylamino)aluminum(III)) |
| In TSCA registry | No (sold for research and development usage only) |
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
If you don’t see the needed lot of Tris(diethylamino)aluminum(III) below please contact customer support at sales@ereztech.com
| Pubchem CID | 16685030 |
| SMILES | CCN(CC)[Al](N(CC)CC)N(CC)CC |
| IUPAC Name | N-[bis(diethylamino) alumanyl]-N-methylmethanamine |
| InchI Identifier | InChI=1S/3C4H10N.Al/c3*1-3-5-4-2;/h3*3-4H2,1-2H3;/q3*-1;+3 |
| InchI Key | QTRQHYHCQPFURH-UHFFFAOYSA-N |
Ereztech synthesizes and sells additional Al-compounds.
To purchase Tris(diethylamino)aluminum(III) contact us at sales@ereztech.com