Synonym: Tris(dimethylamido)aluminum(III), Tris(dimethylamino)aluminum dimer, Aluminum dimethylamide, 3DMAAl, (Me2N)3Al

CAS Number 32093-39-3 | MDL Number MFCD00269811 | EC Number 626-275-2

Tris(dimethylamido)aluminum(III) Chemical Structure

Product codeAL3393
CAS number32093-39-3
Assay (purity)98%+
Purity methodby titration:%Al=16.6-17.3
Metal purity99.9%-Al
Molecular weight159.21
NMRconforms to structure
Appearancewhite to yellow crystals
Melting point82-84 °C (lit.)
Molecular formulaC6H18AlN3
Linear formulaAl(N(CH3)2)
Packagingglassware/metal containers/bubblers

Tris(dimethylamino)aluminum is used as a precursor to aluminum nitride (AlN) thin films by organometallic chemical vapor deposition. See a link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Tris(dimethylamino)aluminum contact us at

Safety information

Hazardous class4.3(4.1)
Packing groupI
PictogramsGHS02 GHS07
Signal wordDANGER
Hazard statementsH228-H260-H314-H318-H335
Precautionary statementsP210-P223-P231+P232-P240-P241-P260-P264+P265-P271-P280-P301+P330+P331-P303+P361+P353-P304+P340-P305+P351+P338-P310-P321-P335+P334-P363-P370+P378-P402+P404-P405-P501
Transport descriptionORGANOMETALLIC SUBSTANCE, SOLID, WATER-REACTIVE, FLAMMABLE (Tris(dimethylamino) aluminum)
In TSCA registryNo (sold for research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(dimethylamino)aluminum below please contact customer support at

Lot# 030/145 Lot# 003/569 Lot# 030/080 Lot# 003/655

External identifiers for 3DMAAl

Pubchem CID16688802
IUPAC NameN-[bis(dimethylamino)alumanyl]-N-methylmethanamine
InchI IdentifierInChI=1S/6C2H6N.2Al/c6*1-3-2;;/h6*1-2H3;;/q6*-1;2*+3

Known applications and external links

With Tris(dimethylamino)aluminum other customers often ask:

Ereztech synthesizes and sells additional Al-compounds.

To purchase Tris(dimethylamino)aluminum contact us at