Tris(methylcyclopentadienyl)yttrium(III)
Synonym: Y(MeCp)3
CAS Number 329735-72-0 | MDL Number MFCD00145485 | EC Number 630-916-1
Yttrium (III) tris(methylcyclopentadienyl) is considered to have the highest vapor pressure of any of the surveyed yttrium compounds. High vapor pressure of the MO is critical for achieving reasonable growth rates using it as an MOCVD precursor. Y(MeCp)3, combined with H2O as an oxygen source, is applied for the growth of Y2O3 layers by ALD. This precursor produced lower C and H impurity levels and better electrical characteristics in the resulting RE2O3 films. Also, this product, combined with tris(cyclopentadienyl)scandium ScCp3 (Cp = C5H5) and H2O as an oxygen source, has been applied for the growth of amorphous YScO3 thin films by atomic layer deposition. See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Tris(methylcyclopentadienyl)yttrium(III) contact us at sales@ereztech.com
Safety information
UN | 3396 |
Hazardous class | 4.3(4.1) |
Packing group | II |
Pictograms | |
Signal word | DANGER |
Hazard statements | H228-H261-H315-H319-H335 |
Precautionary statements | P210-P223-P231 + P232-P240-P241-P261-P264 + P265-P271-P280-P302 + P335 + P334-P302 + P352-P304 + P340-P305 + P351 + P338-P319-P332 + P317-P334 + P335-P337 + P317-P362 + P364-P370 + P378-P402 + P404-P403 + P233-P405-P501 |
Transport description | Organometallic substance, solid, water-reactive, flammable Tris(methylcyclopentadienyl)yttrium |
In TSCA registry | No (sold for research and development usage only) |
First Aid Measures
General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
Skin contact | Wash off with soap and plenty of water. Consult a physician. |
Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
If you don’t see the needed lot of Tris(methylcyclopentadienyl)yttrium(III) below please contact customer support at sales@ereztech.com
Lot# 030/136 Lot# 030/137 Lot# 030/138 Lot# 030/139 Lot# 030/140 Lot# 031/325 Lot# 031/421 Lot# 031/427 Lot# 031/433 Lot# 031/437
External identifiers for Y(MeCp)3
Pubchem CID | 22564671 |
SMILES | CC1=[C-]CC=C1.CC1=[C-]CC=C1.CC1=[C-]CC=C1.[Y+3] |
IUPAC Name | 2-methylcyclopenta-1,3-diene; yttrium(3+) |
InchI Identifier | InChI=1S/3C6H7.Y/c3*1-6-4-2-3-5-6;/h3*2,4H,3H2,1H3;/q3*-1;+3 |
InchI Key | OXKRLQPVIZJLDT-UHFFFAOYSA-N |
Known applications and external links
- J. Päiväsaari, J. Niinistö, P. Myllymäki, Ch. Dezelah, Ch.H. Winter, M. Putkonen, M. Nieminen, L. Niinistö, Rare Earth Oxide Thin Films, Topics in Applied Physics, 2007, Vol. 106, 15-32, DOI: 10.1007/11499893_2, “Atomic Layer Deposition of Rare Earth Oxides”
- P. Myllymäki, M. Nieminen, J. Niinistö, M. Putkonen, K. Kukli, L. Niinistö, J. Mater. Chem., 2006,16, 563-569; DOI: 10.1039/B514083H, “High-permittivity YScO3 thin films by atomic layer deposition using two precursor approaches”
With Tris(methylcyclopentadienyl)yttrium(III) other customers often ask:
- Tris(cyclopentadienyl)yttrium(III)
- Tris(ethylcyclopentadienyl)yttrium(III)
- Tris(N,N-bis(trimethylsilyl)amide)yttrium(III)
- Tris(n-butylcyclopentadienyl)yttrium(III)
Ereztech synthesizes and sells additional Y-compounds.
To purchase Tris(methylcyclopentadienyl)yttrium(III) contact us at sales@ereztech.com