Tris(ethylcyclopentadienyl)yttrium

Synonym: Y(EtCp)3, Tris(2-ethyl-2,4-cyclopentadienyl) yttrium

CAS Number 476364-59-7 

Y(EtCp)3 CAS 476364-59-7
Product codeY4597
CAS number476364-59-7
Assay (purity)97.5%+
Metal purityY-99.99%
Purity methodby titration: complexometric, %Y=23.5-25.0
Molecular weight368.34 g/mol
Formsolid
Appearanceyellow crystals
Decomposition temperature182.5 to 183°C (360.5 to 361.4°F)
Sensitivityair, moisture
Molecular formulaC21H27Y
Lineal formula(C2H5C5H4)3Y
Packagingglassware/metal containers/bubblers

Tris(ethylcyclopentadienyl)yttrium,combined with H2O vapor as oxygen source, was used for the deposition of  yttria Y2O3 thin films on Si by ALD; the precursor evaporation conditions were 120°C/ 0.6-2 mbar. Film growth kinetics was investigated; the growth rate was constant with number of deposition cycles, at optimal ALD conditions being 1.7±0.1 Å/cycle. However, the gradual increase in growth rate was observed when increasing the reactor temperature from 200 to 400°C, with a narrow plateau at ca.~250–285°C. Y2O3 films were stoichiometric with no detectable C contamination as per XPS data); as-deposited Y2O3 layers were polycrystalline (according to glancing incidence XRD). See links below

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Safety information 

UN3395
Hazardous class4.3
Packing groupII
Pictogram GHS02
Signal wordDANGER
Hazard statementsH228-H261
Precautionary statementsP210-P223-P231 + P232-p240-P241-P280
Transport descriptionORGANOMETALLIC SUBSTANCE, SOLID, WATER-REACTIVE (TRIS (ETHYLCYCLOPENTADIENYL) YTTRIUM)
In TSCA registryNo, sold for research and development usage only

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

 

Certificates of Analysis (CoA)

Lot#031/357 Lot# 031/391

External identifiers for Y(EtCp)3 (CAS 476364-59-7)

Pubchem CID101468254
SMILESCCC1=CC=C[CH]1.CCC1=CC=C[CH]1.CCC1=CC=C[CH]1.[Y]
IUPAC Name1-ethylcyclopenta-1,3-diene; yttrium
InchI IdentifierInChI=1S/3C7H9.Y/c3*1-2-7-5-3-4-6-7;/h3*3-6H,2H2,1H3;
InchI KeyJHFCTJHPQRVPAJ-UHFFFAOYSA-N

Known applications and external links

With Yttrium Ethylcyclopentadienyl (CAS 476364-59-7) other customers often ask:

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