Tris(ethylcyclopentadienyl) yttrium CAS 476364-59-7
Y(EtCp)3, Tris(2-ethyl-2,4-cyclopentadienyl) yttrium
|Titration type||Compexometry, %Y=23.5-25.0|
Download product specification for Y4597
Tris(ethylcyclopentadienyl)yttrium (CAS 476364-59-7), aka Y(EtCp)3 (combined wioth H2O vapor as oxygen source) was used for the deposition of yttria Y2O3 thin films on Si by ALD; the precursor evaporation conditions were 120°C/ 0.6-2 mbar. Film growth kinetics was investigated; growth rate was constant with number of deposition cycles, at optimal ALD conditions being 1.7±0.1 Å/cycle. However, gradual increase in growth rate was observed whene increasing the reactor temperature from 200 to 400°C, with a narrow plateau at ca.~250–285°C. Y2O3 films were stoichiometric with no detectable C contamination as per XPS data); as-deposited Y2O3 layers were polycrystalline (according to glancing incidence XRD)(2).
Ereztech manufactures this product with the minimum assay purity of 98% and guaranteed metal purity of Y-99.99%. Available packages are glass ampules or metal containers.
Safety and regulations for Y(EtCp)3
In TSCA registryNo
|Transport description||ORGANOMETALLIC SUBSTANCE, SOLID, WATER-REACTIVE (TRIS (ETHYLCYCLOPENTADIENYL) YTTRIUM)|
|Can be shipped air||Yes|
|In TSCA registry||No – sold for R&D usage only|
First Aid Measures
|General advice||Move out of dangerous area. Consult a physician. Show this safety data sheet to the doctor in attendance.|
|Eye contact||Immediately flush eyes with plenty of water, occasionally lifting the upper and lower eyelids. Check for and remove any contact lenses. Continue rinsing.|
|Skin contact||Wash off contaminated skin with soap and plenty of water. Get medical attention if irritation develops and persists or if burns occur.|
|Inhalation||Remove victim to fresh air and keep at rest in a position comfortable for breathing. If not breathing, if breathing is irregular or if respiratory arrest occurs, provide artificial respiration or oxygen by trained personnel. If unconscious, place in recovery position and get medical attention immediately. Maintain an open airway. Loosen tight clothing such as a collar, tie, belt or waistband. It may be dangerous to the person providing aid to give mouth-to-mouth resuscitation. Call a POISON CENTER or doctor/physician.|
|Ingestion||Call a physician or POISON CONTROL CENTER immediately. Rinse mouth. Do NOT induce vomiting. Remove dentures if any. If vomiting occurs, the head should be kept low so that vomit does not enter the lungs. Never give anything by mouth to an unconscious person. If unconscious, place in recovery position and get medical attention immediately. Maintain an open airway. Loosen tight clothing such as a collar, tie, belt or waistband.|
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Existing certificates of assurance
External identifiers for Y(EtCp)3
|IUPAC Name||1-ethylcyclopenta-1,3-diene; yttrium|
Known applications and external links for Tris(ethylcyclopentadienyl)yttrium
- Prodyut Majumder, Gregory Jursich, Adam Kueltzo, Christos Takoudis. Atomic Layer Deposition of Y[sub 2]O[sub 3] Films on Silicon Using Tris(ethylcyclopentadienyl) Yttrium Precursor and Water Vapor. Journal of The Electrochemical Society 2008, 155, G152. DOI: 10.1149/1.2929825.
- Prodyut Majumder, Gregory Jursich, Adam Kueltzo, Christos Takoudis, J. Electrochem. Soc., Volume 155, Issue 8, pp. G152-G158 (2008) Atomic Layer Deposition of Y2O3 Films on Silicon Using Tris(ethylcyclopentadienyl) Yttrium Precursor and Water Vapor
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Alternative product names: Y(EtCp)3 yttrium ethylcyclopentadienyl E