Synonym: Y(MeCp)3

CAS Number 329735-72-0 | MDL Number MFCD00145485 | EC Number 630-916-1 


Tris(methylcyclopentadienyl)yttrium(III), Y(MeCp)3, CAS 329735-72-0

Product codeY5720
CAS number329735-72-0
Assay (purity)98%+
Purity methodby titration: %Y=26.7-27.8 (complexometric)
Metal purity99.9%-Y
Melting point122-123 C
Molecular weight326.27 g/mol
Appearanceyellow crystals
Molecular formulaC18H21Y
Linear formulaY(C6H7)3
Packagingglassware/metal containers/bubblers

Yttrium (III) tris(methylcyclopentadienyl) is considered to have the highest vapor pressure of any of the surveyed yttrium compounds. High vapor pressure of the MO is critical for achieving reasonable growth rates using it as an MOCVD precursor. Y(MeCp)3, combined with H2O as an oxygen source, is applied for the growth of Y2O3 layers by ALD. This precursor produced lower C and H impurity levels and better electrical characteristics in the resulting RE2O3 films. Also, this product, combined with tris(cyclopentadienyl)scandium ScCp3 (Cp = C5H5) and H2O as an oxygen source, has been applied for the growth of amorphous YScO3 thin films by atomic layer deposition. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Tris(methylcyclopentadienyl)yttrium(III) contact us at

Safety information

Hazardous class4.3(4.1)
Packing groupII
Signal wordDANGER
Hazard statementsH228-H261-H315-H319-H335
Precautionary statementsP210-P223-P231 + P232-P240-P241-P261-P264-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338
Transport descriptionOrganometallic substance, solid, water-reactive, flammable Tris(methylcyclopentadienyl)yttrium
In TSCA registryNo (sold for research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(methylcyclopentadienyl)yttrium(III) below please contact customer support at

Lot# 030/136 Lot# 030/137 Lot# 030/138 Lot# 030/139 Lot# 030/140 Lot# 031/325 Lot# 031/421 Lot# 031/427 Lot# 031/433 Lot# 031/437

External identifiers for Y(MeCp)3

Pubchem CID22564671
IUPAC Name2-methylcyclopenta-1,3-diene; yttrium(3+)
InchI IdentifierInChI=1S/3C6H7.Y/c3*1-6-4-2-3-5-6;/h3*2,4H,3H2,1H3;/q3*-1;+3

Known applications and external links

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Ereztech synthesizes and sells additional Y-compounds.

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