Titanium(IV) diisopropoxide bis(dimethylaminoethoxide)
Synonym: Titanium bis(dimethylaminoethoxide) bis(isopropoxide), Ti(Oi-Pr)2(dmae)2
CAS Number 52406-69-6
Titanium(IV) diisopropoxide bis(dimethylaminoethoxide) is a useful as precursor for the deposition of TiO2 layers by MOCVD and ALD. This complex was tested as a precursor for the liquid injection MOCVD growth of TiO2 layers at 300-450°C temperatures. This product was applied as a Ti precursor (with H2O as co-precursor) for the deposition of TiO2 layers on Si(100) substrates by ALD. See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI6696 contact us at sales@ereztech.com
Safety information
| UN | Not regulated |
| Hazardous class | Not regulated |
| Packing group | Not regulated |
| Pictograms |  |
| Signal word | WARNING |
| Hazard statements | H315-H319-H335 |
| Precautionary statements | P261-P264-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338-P312-P332 + P313-P337 + P313-P362 |
| Transport description | NONH for all modes of transport |
| In TSCA registry | No (research and development usage only) |
Certificates of Analysis (CoA)
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Known applications and external links
- Anthony C. Jones, Timothy J. Leedham, Peter J. Wright, Michael J. Crosbie, Kirsty A. Fleeting, David J. Otway, Paul O’Brien, Martyn E. Pemble. Synthesis and characterization of two novel titanium isopropoxides stabilized with a chelating alkoxide: their use in the liquid injection MOCVD of titanium dioxide thin films
- J.P. Lee, M.H. Park, T.-M. Chung, Y.-S. Kim, M.M. Sung, Bull. Korean Chem. Soc., 2004 Vol.25, Iss.4, p.475-479, « Atomic Layer Deposition of TiO2 Thin Films from Ti(OiPr)2(dmae)2 and H2O
- Timothee Blanquart, Jaakko Niinistö, Marco Gavagnin, Valentino Longo, Venkateswara R. Pallem∥, Christian Dussarrat∥, Mikko Ritala, Markku Leskelä. Novel Heteroleptic Precursors for Atomic Layer Deposition of TiO2
With Titanium(IV) diisopropoxide bis(dimethylaminoethoxide) other customers often ask:
- Tetrakis(diethylamino)titanium
- Bis(ethylcyclopentadienyl)titanium dichloride
- Diethylaminotitanium trichloride
- Titanium(IV) methoxide, Ti(OMe)4
Ereztech synthesizes and sells additional TI-compounds.
To purchase TI6696 contact us at sales@ereztech.com
