Bis(ethylcyclopentadienyl)titanium(IV) dichloride

Synonym: Ti(EtCp)₂Cl₂, Dichlorobis(ethylcyclopentadienyl)titanium

CAS Number 35625-75-3 | MDL Number MFCD1862447 | EC Number 636-854-1

Bis(ethylcyclopentadienyl)titanium(IV) dichloride is a novel titanium precursor for forming of the high-k dielectric films, used in semiconductor manufacturing. See link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI5753 contact us at sales@ereztech.com

Safety information

UN	3261
Hazardous class	8
Packing group	II
Pictograms
Signal word	DANGER
Hazard statements	H315-H319-H335
Precautionary statements	P222-P231-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport description	Corrosive solid, acidic, organic, n.o.s. (bis(ethylcyclopentadienyl)titanium(IV) dichloride
In TSCA registry	No (research and development usage only)

First Aid Measures

General advice	Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contact	Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact	Wash off with soap and plenty of water. Consult a physician.
Inhalation	If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed	Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

 

Certificates of Analysis (CoA)

If you don’t see the needed lot of Bis(ethylcyclopentadienyl)titanium(IV) dichloride below please contact customer support at sales@ereztech.com

Lot# 015/180

External identifiers for Ti(EtCp)₂Cl₂

Pubchem CID	56846575
IUPAC Name	2-ethylcyclopenta-1,3-diene;titanium(4+);dichloride
SMILES	CCC1=[C-]CC=C1.CCC1=[C-]CC=C1.[Cl-].[Cl-].[Ti+4]
InchI Identifier	InChI=1S/2C7H9.2ClH.Ti/c2*1-2-7-5-3-4-6-7;;;/h2*3,5H,2,4H2,1H3;2*1H;/q2*-1;;;+4/p-2
InchI Key	NDYCJOIYEZKDPF-UHFFFAOYSA-L

Known applications and external links

• Forming method of high-k dielectric film based on novel titanium, zirconium and hafnium precursor and manufacturing method thereof for semiconductor manufacturing, Document Number: 3348892

With Bis(ethylcyclopentadienyl)titanium(IV) dichloride other customers often ask:

• Titanium(IV) methoxide
• Tetrakis(dimethylamino)titanium(IV)
• Diethylaminotitanium trichloride
• Tetrakis(diethylamino)titanium

Ereztech synthesizes and sells additional TI-compounds.

To purchase TI5753 contact us at sales@ereztech.com