PDMAT
Synonym: Pentakis(dimethylamino)tantalum(V), TADMA, Ta(NMe2)5, Tantalum dimethylamide, Ta(N(CH3)2)5
PDMAT is used in the semiconductor industry for the deposition of tantalum nitride-based layers by atomic layer deposition (ALD). Also yields tantalum oxide (Ta2O5) thin films when O2, H2O, NO or H2O2 is present during the deposition process. Tantalum oxide thins films show promise as gate dielectric materials in the manufacture of integrated circuits. The synthesis of PDMAT is widely described in the literature (see the links below). Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Pentakis(dimethylamino)tantalum(V) contact us at sales@ereztech.com
Safety and regulations for Pentakis(dimethylamino)tantalum(V)
| UN | 3132 |
| Hazardous class | 4.3 (4.1) |
| Packing group | I |
| Transport description | Water-reactive solid, flammable, n.o.s. (Pentakis(dimethylamino) tantalum(V)) |
| Pictograms |   |
| Hazard statements | H228-H260-H314-H318 |
| Precautionary statements | P210-P223-P231 + P232-P240-P241-P260-P264-P280 |
| In TSCA registry | No (sold for research and development usage only) |
First Aid Measures
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Available certificates of assurance (CoA)
If you don’t see the needed lot of Pentakis(dimethylamino)tantalum(V) below please contact customer support at sales@ereztech.com
External identifiers for PDMAT
| Pubchem CID | 141059 |
| SMILES | C[N-]C.C[N-]C.C[N-]C.C[N-]C.C[N-]C.[Ta+5] |
| IUPAC Name | dimethylazanide;tantalum(5+) |
| InchI Identifier | InChI=1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5 |
| InchI Key | VSLPMIMVDUOYFW-UHFFFAOYSA-N |
Known applications and external links
With Pentakis(dimethylamino)tantalum(V) other customers often ask:
- Tris(diethylamido)(ethylimido)tantalum(V)
- t-Amylimidotris(dimethylamido)tantalum(V)
- Tris(diethylamido)(tert-butylimido)tantalum(V)
- tert-Butylimidotris(dimethylamido)tantalum(V)
Ereztech synthesizes and sells additional Ta-compounds.
To purchase PDMAT contact us at sales@ereztech.com
