Synonym: Tris(diethylamino)(tert-butylimino)tantalum(V), Tantalum tris(diethylamido)-tert-butylimide, Tert-Butylimido Tris(DiEthylamino) Tantalum, TBTDET

CAS Number 169896-41-7 | MDL Number MFCD02684506 | EC Number 624-910-8

TBTDET chemical structure

Product codeTA6417
CAS number169896-41-7
Assay (purity)98%+
Metal purity99.99%-Ta
Purity methodby integration NMR H1
NMR H1conforms to structure
Molecular weight468.46 g/mol
Boiling point95 °C (203 °F) @ 0.7 hPa (0.5 mmHg)
Appearancecolorless to yellow liquid
Sensitivityair, moisture
Molecular formulaC16H39N4Ta
Linear formula(CH3)3CNTa[N(C2H5)2]3
Packagingglassware/metal containers/bubblers

Tris(diethylamido)(tert-butylimido)tantalum(V) was involved as a precursor in the atomic layer deposition of films, including a new route for selective deposition of thin oxide by atomic layer deposition. Plasma-enhanced ALD (PE-ALD) is considered to be very promising for the deposition of high-quality, stable, and conductive tantalum-based films. The reactants for the thALD TaxNy barrier layer deposition at 250 °C were TBTDET as precursor and ammonia as co-reactant. A novel plasma-enhanced atomic layer deposition-grown mixed-phase/nanolaminate Ru–TaN barrier has been investigated, and it was confirmed that the copper diffusion barrier and direct-plate characteristics of the mixed-phase barrier can be modulated by varying the metal ratio in the film. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA6417 contact us at

Safety information

Hazardous class4.3(3)
Packing groupII
Signal wordDANGER
Hazard statementsH226-H261-H314-H318
Precautionary statementsP210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport descriptionOrganometallic substance, liquid, water-reactive, flammable (Tris(diethylamido)(tert- butylimido) tantalum(V)
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(diethylamido)(tert-butylimido)tantalum(V) below please contact customer support at

Lot# 031/348 Lot# 030/143 Lot# 003/661

External identifiers for TBTDET

Pubchem CID4100858
IUPAC Nametert-butyliminotantalum;diethylazanide
InchI IdentifierInChI=1S/C4H9N.3C4H10N.Ta/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;

Known applications and external links

With Tris(diethylamido)(tert-butylimido)tantalum(V) other customers often ask:

Ereztech synthesizes and sells additional TA-compounds.

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