Synonym: Pentakis(dimethylamino)tantalum(V), TADMA, Ta(NMe2)5, Tantalum dimethylamide, Ta(N(CH3)2)5

CAS 19824-59-0 Chemical Structure

Product codeTA4590
CAS #19824-59-0
Purity methodby gravimetric assay: %Ta=44.8-45.6 (after ignition to oxide)
Metal purity99.99%-Ta
Molecular weight401.33
NMRconforms to structure
Appearancelight yellow to orange powder and/or chunks
Melting point100.0 °C (212 °F)
Boiling point150.0 °C (302 °F)
Sensitivityair, moisture
Molecular formulaC10H30N5Ta
Linear formulaTa(N(CH3)2)5
Packagingglassware/metal containers/bubblers

PDMAT  is used in the semiconductor industry for the deposition of tantalum nitride-based layers by atomic layer deposition (ALD). Also yields tantalum oxide (Ta2O5) thin films when O2, H2O, NO or H2O2 is present during the deposition process.  Tantalum oxide thins films show promise as gate dielectric materials in the manufacture of integrated circuits. The synthesis of PDMAT is widely described in the literature (see the links below). Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Pentakis(dimethylamino)tantalum(V) contact us at sales@ereztech.com

Safety and regulations for Pentakis(dimethylamino)tantalum(V)

Hazardous class4.3 (4.1)
Packing groupI
Transport descriptionWater-reactive solid, flammable, n.o.s. (Pentakis(dimethylamino) tantalum(V))
Pictograms GHS02
Hazard statementsH228-H260-H314-H318
Precautionary statementsP210-P223-P231 + P232-P240-P241-P260-P264-P280
In TSCA registryNo (sold for research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

Available certificates of assurance (CoA)

If you don’t see the needed lot of Pentakis(dimethylamino)tantalum(V) below please contact customer support at sales@ereztech.com

Lot# 031/368 Lot# 029/208

External identifiers for PDMAT

Pubchem CID141059
IUPAC Namedimethylazanide;tantalum(5+)
InchI IdentifierInChI=1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5

Known applications and external links

With Pentakis(dimethylamino)tantalum(V) other customers often ask:

Ereztech synthesizes and sells additional Ta-compounds.

To purchase PDMAT contact us at sales@ereztech.com