Synonym: Pentakis(dimethylamino)tantalum(V), TADMA, Ta(NMe2)5, Tantalum dimethylamide, Ta(N(CH3)2)5
| Product code | TA4590 |
| CAS # | 19824-59-0 |
| Purity | 99% |
| Purity method | by gravimetric assay: %Ta=44.8-45.6 (after ignition to oxide) |
| Metal purity | 99.99%-Ta |
| Molecular weight | 401.33 |
| NMR | conforms to structure |
| Form | solid |
| Appearance | light yellow to orange powder and/or chunks |
| Melting point | 100.0 °C (212 °F) |
| Boiling point | 150.0 °C (302 °F) |
| Sensitivity | air, moisture |
| Molecular formula | C10H30N5Ta |
| Linear formula | Ta(N(CH3)2)5 |
| Packaging | glassware/metal containers/bubblers |
Pentakis(dimethylamino)tantalum(V), also known as PDMAT or TADMA, is an organotantalum compound with the molecular formula C₁₀H₃₀N₅Ta and a molecular weight of 401.33 g/mol. The structure features tantalum in the +5 oxidation state, coordinated with five dimethylamino groups, making it highly reactive in synthesis. This light yellow to orange powder (99% pure by gravimetric assay) is sensitive to both air and moisture, necessitating storage in an inert, dry environment.
Pentakis(dimethylamino)tantalum(V) is widely used in chemical vapor deposition (CVD) as a precursor for thin-film applications, especially in semiconductor manufacturing, where it enables precise layering of tantalum-based films.
Classified with hazard codes H228-2, H260, H314, and H318, PDMAT requires careful handling due to its water-reactive and flammable nature. It should be stored in airtight, inert gas containers, with protective gear necessary for safe handling.
PDMAT is essential in semiconductor and electronic component production. Its reactivity and stability make it an ideal precursor for creating high-purity tantalum nitride and oxide layers in advanced manufacturing processes.
PDMAT is used in the semiconductor industry for the deposition of tantalum nitride-based layers by atomic layer deposition (ALD). Also yields tantalum oxide (Ta2O5) thin films when O2, H2O, NO or H2O2 is present during the deposition process. Tantalum oxide thins films show promise as gate dielectric materials in the manufacture of integrated circuits. The synthesis of PDMAT is widely described in the literature (see the links below). Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Pentakis(dimethylamino)tantalum(V) contact us at sales@ereztech.com
| UN | 3132 |
| Hazardous class | 4.3 (4.1) |
| Packing group | I |
| Transport description | Water-reactive solid, flammable, n.o.s. (Pentakis(dimethylamino) tantalum(V)) |
| Pictograms | |
| Hazard statements | H228-H260-H314-H318 |
| Precautionary statements | P210-P223-P231 + P232-P240-P241-P260-P264-P280 |
| In TSCA registry | No (sold for research and development usage only) |
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
If you don’t see the needed lot of Pentakis(dimethylamino)tantalum(V) below please contact customer support at sales@ereztech.com
| Pubchem CID | 141059 |
| SMILES | C[N-]C.C[N-]C.C[N-]C.C[N-]C.C[N-]C.[Ta+5] |
| IUPAC Name | dimethylazanide;tantalum(5+) |
| InchI Identifier | InChI=1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5 |
| InchI Key | VSLPMIMVDUOYFW-UHFFFAOYSA-N |
Ereztech synthesizes and sells additional Ta-compounds.
To purchase PDMAT contact us at sales@ereztech.com