Pentamethylcyclopentadienylzirconium trichloride

Synonym: Pentamethylcyclopentadienylzirconium(IV) trichloride; 1,2,3,5,5-pentamethylcyclopenta-1,3-diene, zirconium(3+), trichloride; Me5CpZrCl3

CAS Number 75181-07-6 | MDL Number MFCD00070444 

Me5CpZrCl3 chemical structure

Product codeZR1076
CAS number75181-07-6
Assay (purity)99%
Purity methodby titration with AgNO3
Molecular weight332.81 g/mol
Melting point230 °C (446 °F)
Appearancelight yellow powder
Molecular formulaC10H15Cl3Zr
Linear formulaC10H15Cl3Zr
Packagingglassware/metal containers/bubblers

Pentamethylcyclopentadienylzirconium trichloride may be used as a precursor to depositing zirconium-containing layers using vapor deposition methods such as chemical vapor deposition or atomic layer deposition. See link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing ZR1076 contact us at

Safety information

Hazardous class8
Packing groupII
Signal wordWARNING
Hazard statementsH315-H319-H335
Precautionary statementsP261-P264-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338-P312-P332 + P313-P337 + P313-P362
Transport descriptionCorrosive solid, acidic, organic, n.o.s. (Pentamethylcyclo- pentadienylzirconium (IV) trichloride)
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Pentamethylcyclopentadienylzirconium trichloride below please contact customer support at

Lot# 020/273

External identifiers for Me5CpZrCl3

Pubchem CID90475860
IUPAC Name1,2,3,4,5-pentamethylcyclopenta-1,3-diene;trichlorozirconium
InchI IdentifierInChI=1S/C10H15.3ClH.Zr/c1-6-7(2)9(4)10(5)8(6)3;;;;/h1-5H3;3*1H;/q;;;;+3/p-3

Known applications and external links

With Pentamethylcyclopentadienylzirconium trichloride other customers often ask:

Ereztech synthesizes and sells additional ZR-compounds.

To purchase ZR1076 contact us at