Tantalum tetraethoxy dimethylaminoethoxide

Synonym: Tantalum tetraethoxide dimethylaminoethoxide, Ta(OEt)₄(DMAE)

CAS Number 172901-22-3 | MDL Number MFCD01861972 

Product code	TA1223
CAS number	172901-22-3
Assay (purity)	98%+
Metal purity	99.99%-Ta
Purity method	by integration NMR
NMR H1	conforms to structure
Molecular weight	449.32 g/mol
Boiling point	125 °C (257 °F) @ 1 mm Hg
Form	liquid
Appearance	colorless to amber liquid
Sensitivity	air, moisture
Molecular formula	C12H30NO5Ta
Linear formula	Ta(OC2H5)4OCH2CH2N(CH3)2
Packaging	glassware/metal containers/bubblers

Tantalum tetraethoxy dimethylaminoethoxide and Titanium bis-ethoxide bis-dimethylaminoehtoxide were used as precursors for Ta₂O₅ and (TiO₂)-(Ta₂O₅) films have been deposited on silicon at low temperature by Injection Metallorganic Chemical Vapor Deposition (IMOCVD).  The influence of deposition conditions on the deposition process and structural properties of the films has been studied by FTIR, EPMA and XRD. This product has been used as a precursor of the first tantalum pentoxide dielectric films as deposited by the new technique of low-pressure ultraviolet-assisted injection liquid source (UVILS) chemical vapour deposition (UVILS-CVD). See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA1223 contact us at sales@ereztech.com

Safety information

UN	Not regulated
Hazardous class	Not regulated
Packing group	Not regulated
Pictograms
Signal word	WARNING
Hazard statements	H303-H313-H319-H332-H335
Precautionary statements	P261-P264-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338-P311-P312-P332 + P313-P337 + P313-P362
Transport description	NONH for all modes of transport
In TSCA registry	No (research and development usage only)

First Aid Measures

General advice	Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contact	Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact	Wash off with soap and plenty of water. Consult a physician.
Inhalation	If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed	Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

 

Certificates of Analysis (CoA)

If you don’t see the needed lot of Tantalum tetraethoxy dimethylaminoethoxide below please contact customer support at sales@ereztech.com

Lot# 019/275 Lot# 019/295

External identifiers for Ta(OEt)₄(DMAE)

Pubchem CID	87224138
IUPAC Name	2-(dimethylamino)ethanol;ethanol;tantalum
SMILES	CCO.CCO.CCO.CCO.CN(C)CCO.[Ta]
InchI Identifier	InChI=1S/C4H11NO.4C2H6O.Ta/c1-5(2)3-4-6;4*1-2-3;/h6H,3-4H2,1-2H3;4*3H,2H2,1H3;
InchI Key	YODRYJGUVQEOOL-UHFFFAOYSA-N

Known applications and external links

• C. Jiménez, M. Paillous, Roland Madar, J.P. Sénateur, A.C. Jones Deposition of Ta2O5 and (TiO2)-(Ta2O5) films from Ta(OEt)4(DMAE) and Ti(OEt)2(DMAE)2, by IMOCVD
• M.B.Mooneya, P.K.Hurleya, B.J.O’Sullivana, J.T.Beechinora, J.-Y.Zhang, I.W.Boyd, P.V.Kellya, J.-P.Sénateurc, G.M.Creana, C.Jimenezc, M.Paillousc Characteristics of tantalum pentoxide dielectric films deposited on silicon by excimer-lamp assisted photo-induced CVD using an injection liquid source

With Tantalum tetraethoxy dimethylaminoethoxide other customers often ask:

• Pentakis(dimethylamino)tantalum(V)
• Tantalum(V) butoxide
• Tantalum (V) ethoxide
• Tris(diethylamido)(tert-butylimido)tantalum(V)

Ereztech synthesizes and sells additional TA-compounds.

To purchase TA1223 contact us at sales@ereztech.com