Tetrakis(1-methoxy-2-methyl-2-propoxy) zirconium
Synonym: Zirconium tetrakis(methoxymethylpropanolate), Zirconium(MMP)4, ZR(MMP)4
CAS Number 615287-00-8
Tetrakis(1-methoxy-2-methyl-2-propoxy) zirconium is a new Zr alkoxide precursor that has been used, together with Zr(OtBu)2(mmp)2, for deposition of ZrO2 thin films by liquid injection metal-organic (MO)CVD. PbZr(x)Ti(1-x)O3 (PZT) thin films were deposited on 3-dimensional nano-scale trench structures for use in giga-bit density ferroelectric random access memories. PZT thin films were deposited by liquid delivery metalorganic chemical vapor deposition using Pb(thd)2, Zr(MMP)4, and Ti(MMP)4 precursors dissolved in ethyl cyclohexane. Zr(MMP)4, dissolved together with Pb(DMAMP)2 and Ti(MMP)4 in the ethylcyclohexane solvent (a “cocktail” solution), was applied for the growth of ferroelectric PbZrTiOx thin films by liquid delivery MOCVD. See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing ZR7008 contact us at sales@ereztech.com
Safety information
| UN | 1993 |
| Hazardous class | – |
| Packing group | III |
| Pictograms | None |
| Signal word | WARNING |
| Hazard statements | H227 |
| Precautionary statements | P210-P280-P370 + P378-P403 + P235 |
| Transport description | Combustible liquid, n.o.s. (Tetrakis(1- methoxy-2-methyl-2- propoxy)zirconium(IV)) |
| In TSCA registry | No (research and development usage only) |
Certificates of Analysis (CoA)
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Known applications and external links
- Shin S, Koo JM, Kim S, Seo BS, Lee JH, Baik H, Park Y, Han H, Baik S, Lee JK. Fabrication of 3-dimensional PbZr(1-x)Ti(x)O3 nanoscale thin film capacitors for high density ferroelectric random access memory devices. J Nanosci Nanotechnol. 2006 Nov;6(11):3333-7.
- P. A. Williams, J. L. Roberts, A. C. Jones, P. R. Chalker, N. L. Tobin, J. F. Bickley, H. O. Davies, L. M. Smith, T. J. Leedham. Novel Mononuclear Alkoxide Precursors for the MOCVD of ZrO2 and HfO2 Thin Films
With Tetrakis(1-methoxy-2-methyl-2-propoxy) zirconium other customers often ask:
- [Dimethylbis(cyclopentadienyl)silyl]zirconium dichloride
- Zirconium(IV)isopropoxide
- Zirconium(IV)ethoxide
- Zirconium tetrakis(2,2,6,6-tetramethyl- 3,5-heptanedionate)
Ereztech synthesizes and sells additional ZR-compounds.
To purchase ZR7008 contact us at sales@ereztech.com
