Titanium(IV) diisopropoxide bis(dimethylaminoethoxide)

Synonym: Titanium bis(dimethylaminoethoxide) bis(isopropoxide), Ti(Oi-Pr)2(dmae)2

CAS Number 52406-69-6 

Product codeTI6696
CAS number52406-69-6
Assay (purity)97.5%+
Purity methodby elemental analysis: % C = 47.9 – 50.3; % H = 9.8 – 10.3 %
NMR H1conforms to structure
Molecular weight342.32 g/mol
Formliquid or solid
Appearancecolorless oily liquid or solid
Sensitivityair, moisture
Molecular formulaC14H34O4N2Ti
Linear formulaTi(OC3H7)2[OCH2CH2N(CH3)2]2
Packagingglassware/metal containers/bubblers

Titanium(IV) diisopropoxide bis(dimethylaminoethoxide) is a useful as precursor for the deposition of TiO2 layers by MOCVD and ALD. This complex was tested as a precursor for the liquid injection MOCVD growth of TiO2 layers at 300-450°C temperatures. This product was applied as a Ti precursor (with H2O as co-precursor) for the deposition of TiO2 layers on Si(100) substrates by ALD. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TI6696 contact us at sales@ereztech.com

Safety information

UNNot regulated
Hazardous classNot regulated
Packing groupNot regulated
Signal wordWARNING
Hazard statementsH315-H319-H335
Precautionary statementsP261-P264-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338-P312-P332 + P313-P337 + P313-P362
Transport descriptionNONH for all modes of transport
In TSCA registryNo (research and development usage only)


Certificates of Analysis (CoA)

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Known applications and external links

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Ereztech synthesizes and sells additional TI-compounds.

To purchase TI6696 contact us at sales@ereztech.com