Tris(diethylamido)(ethylimido)tantalum(V)

Synonym: Tris(diethylamino)(ethylimino)tantalum(V), Ta(NEt)(NEt₂)₃

CAS Number 67313-80-8 | MDL Number MFCD03093879 | EC Number 633-181-5 

Product code	TA3808
CAS number	67313-80-8
Assay (purity)	99%+
Metal purity	99.99%-Ta
Purity method	by gravimetric assay after ignition to oxide
NMR H1	conforms to structure
Molecular weight	440.40 g/mol
Form	liquid
Appearance	yellow to amber liquid
Molecular formula	C14H35N4Ta
Linear formula	[(C2H5)2N]3Ta(C2H5N)
Packaging	glassware/metal containers/bubblers

Tris(diethylamido)(ethylimido)tantalum(V) has been used as a precursor for Ta2O5 thin films deposition as well as highly conformal atomic layer deposition of tantalum oxide. See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA3808 contact us at sales@ereztech.com

Safety information

UN	2924
Hazardous class	3(8)
Packing group	II
Pictograms
Signal word	DANGER
Hazard statements	H225-H314-H318
Precautionary statements	P210-P223-P231 + P232-P240-P241-P242-P243-P264-P280-P301 + P330 + P331-P303 + P361 + P353-P304 + P340-P305 + P351 + P338-P310-P334 + P335-P363-P370 + P378
Transport description	FLAMMABLE LIQUID, CORROSIVE, N. O.S. (Tris(diethylamido)(ethylimido) tantalum(V))
In TSCA registry	No (research and development usage only)

First Aid Measures

General advice	Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contact	Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact	Wash off with soap and plenty of water. Consult a physician.
Inhalation	If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed	Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

 

Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(diethylamido)(ethylimido)tantalum(V) below please contact customer support at sales@ereztech.com

 

External identifiers for Ta(NEt)(NEt₂)₃

Pubchem CID	4067399
IUPAC Name	diethylazanide;ethyliminotantalum
SMILES	CC[N-]CC.CC[N-]CC.CC[N-]CC.CCN=[Ta]
InchI Identifier	InChI=1S/3C4H10N.C2H5N.Ta/c3*1-3-5-4-2;1-2-3;/h3*3-4H2,1-2H3;2H2,1H3;/q3*-1;;
InchI Key	LPVQKHFDFSMBIS-UHFFFAOYSA-N

Known applications and external links

• Kristin Pfeiffer, Ulrike Schulz, Andreas Tünnermann, Adriana Szeghalmi Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
• Dennis M. Hausmann, Philippe de Rouffignac, Amethyst Smith, Roy Gordon, Douwe Monsma Highly conformal atomic layer deposition of tantalum oxide using alkylamide precursors

With Tris(diethylamido)(ethylimido)tantalum(V) other customers often ask:

• Pentakis(dimethylamino)tantalum(V)
• Tantalum(V) butoxide
• Tantalum (V) ethoxide
• Tantalum tetraethoxy dimethylaminoethoxide

Ereztech synthesizes and sells additional TA-compounds.

To purchase TA3808 contact us at sales@ereztech.com