Tantalum tetraethoxy dimethylaminoethoxide

Synonym: Tantalum tetraethoxide dimethylaminoethoxide, Ta(OEt)4(DMAE)

CAS Number 172901-22-3 | MDL Number MFCD01861972 

Ta(OEt)4(DMAE) chemical structure

Product codeTA1223
CAS number172901-22-3
Assay (purity)98%+
Metal purity99.99%-Ta
Purity methodby integration NMR
NMR H1conforms to structure
Molecular weight449.32 g/mol
Boiling point125 °C (257 °F) @ 1 mm Hg
Appearancecolorless to amber liquid
Sensitivityair, moisture
Molecular formulaC12H30NO5Ta
Linear formulaTa(OC2H5)4OCH2CH2N(CH3)2
Packagingglassware/metal containers/bubblers

Tantalum tetraethoxy dimethylaminoethoxide and Titanium bis-ethoxide bis-dimethylaminoehtoxide were used as precursors for Ta2O5 and (TiO2)-(Ta2O5) films have been deposited on silicon at low temperature by Injection Metallorganic Chemical Vapor Deposition (IMOCVD).  The influence of deposition conditions on the deposition process and structural properties of the films has been studied by FTIR, EPMA and XRD. This product has been used as a precursor of the first tantalum pentoxide dielectric films as deposited by the new technique of low-pressure ultraviolet-assisted injection liquid source (UVILS) chemical vapour deposition (UVILS-CVD). See links below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing TA1223 contact us at sales@ereztech.com

Safety information

UNNot regulated
Hazardous classNot regulated
Packing groupNot regulated
Signal wordWARNING
Hazard statementsH303-H313-H319-H332-H335
Precautionary statementsP261-P264-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338-P311-P312-P332 + P313-P337 + P313-P362
Transport descriptionNONH for all modes of transport
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Tantalum tetraethoxy dimethylaminoethoxide below please contact customer support at sales@ereztech.com

Lot# 019/275 Lot# 019/295

External identifiers for Ta(OEt)4(DMAE)

Pubchem CID87224138
IUPAC Name2-(dimethylamino)ethanol;ethanol;tantalum
InchI IdentifierInChI=1S/C4H11NO.4C2H6O.Ta/c1-5(2)3-4-6;4*1-2-3;/h6H,3-4H2,1-2H3;4*3H,2H2,1H3;

Known applications and external links

With Tantalum tetraethoxy dimethylaminoethoxide other customers often ask:

Ereztech synthesizes and sells additional TA-compounds.

To purchase TA1223 contact us at sales@ereztech.com