Synonym: TDEAA, Tris(diethylamino)alane, Tris(diethylamido)aluminum, Tris(diethyl-amino)aluminum(III), Tris(diethylamino)alane, Aluminum Diethylazanide, Al(NEt2)3

CAS Number 352546-72-6 | MDL Number MFCD03458803 

TDEAA Chemical Structure

Product codeAL6726
CAS number352546-72-6
Assay (purity)98%+
Purity methodby integration NMR H1: % Cl ̄ < 3 ppm
NMRconforms to structure
Molecular weight486.74 g/mol
Appearanceyellow liquid
Melting point28 – 31 °C (82.4 – 87.8 °F)
Boiling point50 °C (122 °F)
Flash point21 °C (69.8 °F)
Sensitivityair, moisture, heat
Molecular formulaC12H30AlN3
Linear formulaAl(N(C2H5)2)3
Packagingglassware/metal containers/bubblers

Tris(diethylamido)aluminum is a non-pyrophoric liquid aluminum precursor. This product was proposed as Al precursor for the Al2O3 deposition by ALD, as well as for the growth of HfAlO films in cocktail mixture with Hf(NEt2)4. It is also was shown to be a useful precursor to aluminum nitride (AlN) thin films by MOCVD. See link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Tris(diethylamino)aluminum(III) contact us at

Safety information

Hazardous class4.3(3)
Packing groupI
PictogramsGHS02  GHS07
Signal wordDANGER
Hazard statementsH225-H260-H314-H318-H335
Precautionary statementsP210-P223-P231 + P232-P233-P240-P241-P242-P243-P260-P264-P280-P301 + P330 + P331-P303 + P361 + P353
Transport descriptionOrganometallic substance, liquid, water-reactive, flammable (Tris(diethylamino)aluminum(III))
In TSCA registryNo (sold for research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(diethylamino)aluminum(III) below please contact customer support at

Lot# 007/1263 Lot# 003/563

External identifiers for TDEAA

Pubchem CID16685030
IUPAC NameN-[bis(diethylamino) alumanyl]-N-methylmethanamine
InchI IdentifierInChI=1S/3C4H10N.Al/c3*1-3-5-4-2;/h3*3-4H2,1-2H3;/q3*-1;+3

Known applications and external links

With Tris(diethylamino)aluminum(III) other customers often ask:

Ereztech synthesizes and sells additional Al-compounds.

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