Tris(diethylamino)aluminum(III)

Synonym: TDEAA, Tris(diethylamino)alane, Tris(diethylamido)aluminum, Tris(diethyl-amino)aluminum(III), Tris(diethylamino)alane, Aluminum Diethylazanide, Al(NEt2)3

CAS Number 352546-72-6 | MDL Number MFCD03458803 

TDEAA Chemical Structure

Product code AL6726
CAS number 352546-72-6
Assay (purity) 98%+
Purity method by integration NMR H1: % Cl ̄ < 3 ppm
NMR conforms to structure
Molecular weight 486.74 g/mol
Form liquid
Appearance yellow liquid
Melting point 28 – 31 °C (82.4 – 87.8 °F)
Boiling point 50 °C (122 °F)
Flash point 21 °C (69.8 °F)
Sensitivity air, moisture, heat
Molecular formula C12H30AlN3
Linear formula Al(N(C2H5)2)3
Packaging glassware/metal containers/bubblers

Tris(diethylamido)aluminum is a non-pyrophoric liquid aluminum precursor. This product was proposed as Al precursor for the Al2O3 deposition by ALD, as well as for the growth of HfAlO films in cocktail mixture with Hf(NEt2)4. It is also was shown to be a useful precursor to aluminum nitride (AlN) thin films by MOCVD. See link below

Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Tris(diethylamino)aluminum(III) contact us at sales@ereztech.com

Safety information

UN 3399
Hazardous class 4.3(3)
Packing group I
Pictograms GHS02  GHS07
Signal word DANGER
Hazard statements H225-H260-H314-H318-H335
Precautionary statements P210-P223-P231 + P232-P233-P240-P241-P242-P243-P260-P264-P280-P301 + P330 + P331-P303 + P361 + P353
Transport description Organometallic substance, liquid, water-reactive, flammable (Tris(diethylamino)aluminum(III))
In TSCA registry No (sold for research and development usage only)

First Aid Measures

General advice Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contact Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contact Wash off with soap and plenty of water. Consult a physician.
Inhalation If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowed Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.

 

Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(diethylamino)aluminum(III) below please contact customer support at sales@ereztech.com

Lot# 007/1263 Lot# 003/563

External identifiers for TDEAA

Pubchem CID 16685030
SMILES CCN(CC)[Al](N(CC)CC)N(CC)CC
IUPAC Name N-[bis(diethylamino) alumanyl]-N-methylmethanamine
InchI Identifier InChI=1S/3C4H10N.Al/c3*1-3-5-4-2;/h3*3-4H2,1-2H3;/q3*-1;+3
InchI Key QTRQHYHCQPFURH-UHFFFAOYSA-N

Known applications and external links

With Tris(diethylamino)aluminum(III) other customers often ask:

Ereztech synthesizes and sells additional Al-compounds.

To purchase Tris(diethylamino)aluminum(III) contact us at sales@ereztech.com