Synonym: Yttrium tris(isopropylcyclopentadienyl), Y(iPrCp)3

CAS Number 130206-63-2 | EC Number 810-761-8


Product codeY6632
CAS number130206-63-2
Assay (purity)98%
Metal purity99.9%-Y
Purity methodby titration: %Y=21.1-22.2
Molecular weight410.43 g/mol
Appearanceyellow crystals or powder
Sensitivityair, moisture
Molecular formulaC24H33Y
Linear formula(C3H7C5H4)3Y
Packagingglassware/metal containers/bubblers

Tris(isopropylcyclopentadienyl)yttrium has been applied as a precursor for the growth of yttrium sesquioxide (Y2O3) thin films (ca. 2µm thickness) on a glass substrate by MOCVD, using Ar as carrier gas and CO2/H2 mixture as oxidant, with mole fractions of Y(iPrCp)3 7.5 X10~4 and CO2 ~1×10-2, respectively. A novel atomic layer deposition (ALD) route of Y2O3 thin films was developed and demonstrated utilizing Y(iPrCp)3 and O3. The ALD growth characteristics were investigated by varying precursor dosage, reactor temperature, and a number of deposition cycles. The resulting films were analyzed with spectral ellipsometry and x-ray photoelectron spectroscopy, in order to determine stoichiometry, impurity, annealing behavior, and refractive index. The results of this work demonstrate the potential for suggesting Y(iPrCp)3 as a suitable ALD precursor and Ar+ beam as an effective means of removing surface Y(OH)3 on Y2O3 films. See links below

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Safety information

Hazardous class4.3(4.1)
Packing groupII
PictogramsGHS02 GHS07
Signal wordDANGER
Hazard statementsH228-H261-H315-H319-H335
Precautionary statementsP210-P223-P231 + P232-P240-P241-P261-P264-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338-P312-P332 + P313-P334 + P335-P337 + P313-P362-P370 + P378
Transport descriptionOrganometallic substance, solid, water-reactive, flammable Tris(i- propylcyclopentadienyl )yttrium(III)
In TSCA registryNo (research and development usage only)

First Aid Measures

General adviceConsult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area.
Eye contactRinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
Skin contactWash off with soap and plenty of water. Consult a physician.
InhalationIf breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician.
If swallowedDo NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.


Certificates of Analysis (CoA)

If you don’t see the needed lot of Tris(i-propylcyclopentadienyl)yttrium(III) below please contact customer support at

Lot# 020/090

External identifiers for Y(iPrCp)3

Pubchem CID131697940
IUPAC Name2-propan-2-ylcyclopenta-1,3-diene;yttrium(3+)
InchI IdentifierInChI=1S/3C8H11.Y/c3*1-7(2)8-5-3-4-6-8;/h3*3-7H,1-2H3;/q3*-1;+3

Known applications and external links

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Ereztech synthesizes and sells additional Y-compounds.

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