Tris(ethylcyclopentadienyl)yttrium
Synonym: Y(EtCp)3, Tris(2-ethyl-2,4-cyclopentadienyl) yttrium
CAS Number 476364-59-7 | EC Number 810-917-5
Tris(ethylcyclopentadienyl)yttrium,combined with H2O vapor as oxygen source, was used for the deposition of yttria Y2O3 thin films on Si by ALD; the precursor evaporation conditions were 120°C/ 0.6-2 mbar. Film growth kinetics was investigated; the growth rate was constant with number of deposition cycles, at optimal ALD conditions being 1.7±0.1 Å/cycle. However, the gradual increase in growth rate was observed when increasing the reactor temperature from 200 to 400°C, with a narrow plateau at ca.~250–285°C. Y2O3 films were stoichiometric with no detectable C contamination as per XPS data); as-deposited Y2O3 layers were polycrystalline (according to glancing incidence XRD). See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing Y4597 contact us at sales@ereztech.com
Safety information
| UN | 3395 |
| Hazardous class | 4.3 |
| Packing group | II |
| Pictogram |  |
| Signal word | DANGER |
| Hazard statements | H228-H261 |
| Precautionary statements | P210-P223-P231 + P232-p240-P241-P280 |
| Transport description | ORGANOMETALLIC SUBSTANCE, SOLID, WATER-REACTIVE (TRIS (ETHYLCYCLOPENTADIENYL) YTTRIUM) |
| In TSCA registry | No, sold for research and development usage only |
First Aid Measures
| General advice | Consult a physician. Show this safety data sheet to the doctor in attendance. Move out of the dangerous area. |
| Eye contact | Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician. |
| Skin contact | Wash off with soap and plenty of water. Consult a physician. |
| Inhalation | If breathed in, move person into the fresh air. If not breathing, give artificial respiration. Consult a physician. |
| If swallowed | Do NOT induce vomiting. Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician. |
Certificates of Analysis (CoA)
Lot#031/357 Lot# 031/391 Lot# 031/434
External identifiers for Y(EtCp)3
| Pubchem CID | 101468254 |
| SMILES | CCC1=CC=C[CH]1.CCC1=CC=C[CH]1.CCC1=CC=C[CH]1.[Y] |
| IUPAC Name | 1-ethylcyclopenta-1,3-diene; yttrium |
| InchI Identifier | InChI=1S/3C7H9.Y/c3*1-2-7-5-3-4-6-7;/h3*3-6H,2H2,1H3; |
| InchI Key | JHFCTJHPQRVPAJ-UHFFFAOYSA-N |
Known applications and external links
- Prodyut Majumder, Gregory Jursich, Adam Kueltzo, Christos Takoudis. Atomic Layer Deposition of Y[sub 2]O[sub 3] Films on Silicon Using Tris(ethylcyclopentadienyl) Yttrium Precursor and Water Vapor. Journal of The Electrochemical Society 2008, 155, G152. DOI: 10.1149/1.2929825.
- Prodyut Majumder, Gregory Jursich, Adam Kueltzo, Christos Takoudis, J. Electrochem. Soc., Volume 155, Issue 8, pp. G152-G158 (2008) Atomic Layer Deposition of Y2O3 Films on Silicon Using Tris(ethylcyclopentadienyl) Yttrium Precursor and Water Vapor
With Yttrium Ethylcyclopentadienyl other customers often ask:
- Tris(cyclopentadienyl)yttrium(III)
- Tris(methylcyclopentadienyl)yttrium(III)
- Tris(n-butylcyclopentadienyl)yttrium(III)
- Tris(isopropylcyclopentadienyl)yttrium(III)
Ereztech synthesizes and sells additional Y-compounds.
To purchase Tris(ethylcyclopentadienyl)yttrium CAS 476364-59-7 contact us at sales@ereztech.com
