Zirconium(IV) diisopropoxide bis(dimethylaminoethoxide)
Synonym: Zr(Oi-Pr)2(dmae)2
CAS Number 65281-23-4
Zirconium(IV) diisopropoxide bis(dimethylaminoethoxide) is the zirconium aminoalkoxide precursor that was used for growing zirconium dioxide (ZrO2) thin films by alternate surface reactions between new aminoalkoxides and water by the Atomic Layer Deposition (ALD). See links below
Ereztech manufactures and sells this product in small and bulk volumes. Glass ampules, bottles or metal ampules or bubblers are available for packaging. For additional analytical information or details about purchasing ZR1234 contact us at sales@ereztech.com
Safety information
| UN | Not regulated |
| Hazardous class | Not regulated |
| Packing group | Not regulated |
| Pictograms |  |
| Signal word | WARNING |
| Hazard statements | H315-H319-H335 |
| Precautionary statements | P261-P264-P271-P280-P302 + P352-P304 + P340-P305 + P351 + P338-P312-P332 + P313-P337 + P313-P362 |
| Transport description | NONH for all modes of transport |
| In TSCA registry | No (research and development usage only) |
Certificates of Analysis (CoA)
If you don’t see the needed lot of Zirconium(IV) diisopropoxide bis(dimethylaminoethoxide) below please contact customer support at sales@ereztech.com
Known applications and external links
- Matero, R., Ritala, M., Leskelä, M., Sajavaara, T., Jones, A.C. and Roberts, J.L. Evaluation of New Aminoalkoxide Precursors for Atomic Layer Deposition — Growth of ZrO2 Thin Films and Reaction Mechanism Studies Chemistry of Materials
- Raija Matero. Atomic Layer Deposition of Oxide Films – Growth, Characterisation and Reaction Mechanism Studies
- Anthony C. Jones , Helen C. Aspinall , Paul R. Chalker , Richard J. Potter , Troy D. Manning , Yim Fun Loo , Ruairi O’Kane , Jeffrey M. Gaskell , Lesley M. Smith. MOCVD and ALD of High- j DielectricOxides Using Alkoxide Precursors
- Jaakko Niinistö. ATOMIC LAYER DEPOSITION OF HIGH-k DIELECTRICS FROM NOVEL CYCLOPENTADIENYL-TYPE PRECURSORS
With Zirconium(IV) diisopropoxide bis(dimethylaminoethoxide) other customers often ask:
- [Dimethylbis(cyclopentadienyl)silyl]zirconium dichloride
- Zirconium(IV)isopropoxide
- Zirconium(IV)ethoxide
- Zirconium tetrakis(2,2,6,6-tetramethyl- 3,5-heptanedionate)
Ereztech synthesizes and sells additional ZR-compounds.
To purchase ZR1234 contact us at sales@ereztech.com
